Fluorescent x-ray analyzer and fluorescent x-ray analysis method
An analysis device and X-ray technology, applied in the direction of material analysis, measurement device, and material analysis using wave/particle radiation, can solve the problems of deviation of analysis results, preparation time, labor and time, etc., to achieve noise suppression, The effect of reduced preparation time and efficient detection
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[0036] Below, refer to figure 1 and figure 2 A first embodiment of the fluorescent X-ray analysis device and the fluorescent X-ray analysis method of the present invention will be described.
[0037] Such as figure 1 As shown, the fluorescent X-ray analysis device 1 of this embodiment has: a sample container 4 that can accommodate a granular or powdery sample S; an X-ray source 2 that irradiates the sample S with primary X-rays. X1; a detector 3 that detects the fluorescent X-ray X2 generated from the sample S irradiated with the primary X-ray X1; and an irradiation range changing mechanism 5 that can change the irradiation source to the sample S in the sample container 4. Grade X-ray X1 scope.
[0038] Such as figure 1 As shown in (b), the above-mentioned irradiation range changing mechanism 5 can be changed to local irradiation and wide-area irradiation. Sample S irradiates primary X-ray X1, in this wide-range irradiation, such as figure 1 As shown in (a), the sample ...
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