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Method for manufacturing multi-angle rectangular deep cut-off broadband band-pass filter

A technology of bandpass filter and manufacturing method, which is applied in optics, optical components, instruments, etc., to achieve the effects of improving work performance, reducing errors, and good uniformity

Inactive Publication Date: 2019-03-19
SOUTH WEST INST OF TECHN PHYSICS
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Problems solved by technology

[0016] The present invention proposes a manufacturing method of a multi-angle rectangular deep cut-off broadband band-pass filter to solve how to meet the production efficiency of multi-angle incident light, improve the effective area and cut-off of the band-pass filter, and effectively control the negative impact of errors technical issues

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  • Method for manufacturing multi-angle rectangular deep cut-off broadband band-pass filter
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  • Method for manufacturing multi-angle rectangular deep cut-off broadband band-pass filter

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[0039] In order to make the purpose, content and advantages of the present invention clearer, the specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0040] This embodiment proposes a method for manufacturing a multi-angle rectangular deep-cut broadband bandpass filter, the method comprising the following steps:

[0041] (1) In order to solve the shortage of single-cavity filters, a multi-cavity filter design is used to obtain better rectangularity, cut-off and required passband width through the superposition of multiple interference cavities. According to the theoretical design curve of a rectangular deep-cut broadband bandpass filter with a typical half width of 30nm working at 905nm, such as figure 1 As shown, first determine the theoretical film system, based on the typical film structure of the multi-cavity filter, select Ta 2 o 5 As a high refractive index ...

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Abstract

The invention belongs to the technical field of band-pass filters, and particularly relates to a method for manufacturing multi-angle rectangular deep cut-off broadband band-pass filter with high passband rectangular degree and forbidden band deep cut-off performance, which is particularly suitable for a 905 nanometer laser and an application system thereof and is suitable for multi-angle incidence at the same time. The method comprises the following steps of: determining a theoretical film system, and determining a film system structure of an optical filter by superposing a plurality of interference cavities on the basis of a typical film system structure of a multi-cavity optical filter; according to the film system structure of the optical filter, loading the selected coating material in a coating machine, adopting a control mode of eccentric monitoring, and controlling the achievement of the film coating process by monitoring the transmitted light intensity of a monitoring point ona substrate so as to finish the manufacture of the optical filter. According to the method for manufacturing multi-angle rectangular deep cut-off broadband band-pass filter, the multi-cavity opticalfilter is adopted, and the rectangle degree and the cut-off degree can be well improved and the passband bandwidth can be widened through stacking of the single-cavity designs; by adopting the controlmode of eccentric monitoring, the effective area of the coating can be effectively improved.

Description

technical field [0001] The invention belongs to the technical field of band-pass filters, and specifically relates to a multi-angle filter which is especially suitable for 905 nanometer lasers and its application systems, and simultaneously has multi-angle incidence, high pass-band rectangularity and forbidden-band deep cut-off performance. The invention discloses a manufacturing method of a rectangular deep-cut broadband band-pass filter. Background technique [0002] Laser has four optical properties of isotropy, high brightness, monochromaticity and high energy density. Due to its special characteristics relative to ordinary light, lasers and their application systems have played an increasingly important role in the development of modern society, and are widely used in various civil and military fields. In the optical system of the laser and its application system, in order to meet the system design requirements, the optical components that the optical path passes throu...

Claims

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Application Information

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IPC IPC(8): G02B5/28
CPCG02B5/28G02B5/288
Inventor 姚德武马孜肖琦王平秋
Owner SOUTH WEST INST OF TECHN PHYSICS
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