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Multi-degree-of-freedom nanometer positioning platform based on flexible parallel mechanism

A nano-positioning and degree-of-freedom technology, applied in measurement and processing/manufacturing devices, point operations, micro-nano positioning, and motion fields, can solve the problems that multi-degree-of-freedom nano-positioning platforms are difficult to meet, and achieve high bandwidth and wide application area , the effect of large load capacity

Active Publication Date: 2019-03-22
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For applications that require large output stiffness, large load, or high bandwidth, the existing multi-degree-of-freedom nanopositioning platforms are difficult to meet

Method used

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  • Multi-degree-of-freedom nanometer positioning platform based on flexible parallel mechanism
  • Multi-degree-of-freedom nanometer positioning platform based on flexible parallel mechanism
  • Multi-degree-of-freedom nanometer positioning platform based on flexible parallel mechanism

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Effect test

Embodiment 1

[0038] like Figure 1 to Figure 7 Shown is the first embodiment of the multi-degree-of-freedom nanopositioning platform based on the compliant parallel mechanism of the present invention, including the first fixed base 1, the connecting plate 2, the second fixed base 3, the capacitive sensor 5, and the Force / displacement / motion kinematic branch chain, end effector 8 and load connector 9, the kinematic branch chain includes several first kinematic branch chains 6 connected in parallel and located in the plane and the second kinematic branch chain 7 located outside the plane; The first motion branch chain 6 is located on the first fixed base 1, and the second motion branch chain 7 is located on the first fixed base 1 and the second fixed base 3; The fixed base 1 is connected, and the other end is connected with the end effector 8; one end of the second kinematic branch chain 7 is connected with the first fixed base 1, the fulcrum is provided by the second fixed base 3, and the o...

Embodiment 2

[0045] This embodiment is similar to the first embodiment, except that the three sets of second kinematic branch chains output with multiple degrees of freedom, which can form a five-degree-of-freedom or six-degree-of-freedom nano-positioning platform.

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Abstract

The invention relates to the technical field of micro-nano machining and manufacturing devices, in particular to a multi-degree-of-freedom nanometer positioning platform based on a flexible parallel mechanism. Branch movement chains include a first branch movement chain and a second branch movement chain; one end of the first branch movement chain is connected with a first fixed base, and the other end of the first branch movement chain is connected with an end executor; and one end of the second branch movement chain is connected with the first fixed base, a supporting point is provided by asecond fixed base, and the other end of the second branch movement chain is connected with the end executor. The end executor can realize single-degree-of-freedom output through the multi-axis secondbranch movement chain in a vertical direction; through redundant driving with the nanoscale precision, high output rigidity, high acting force, large load capacity, high bandwidth and high precision in the vertical direction can be realized; and the platform can be used as a main shaft in the fields of micro-nano machining and manufacturing, and the like.

Description

technical field [0001] The present invention relates to the technical field of micro-nano positioning, movement, point operation, measurement and processing / manufacturing devices, and more specifically, relates to a multi-degree-of-freedom nano-positioning platform based on a compliant parallel mechanism. Background technique [0002] The compliant mechanism is one of the main means of forming the body of the nanopositioning device. It is a key part of technologies such as micro-nano operation, micro-nano measurement, and micro-nano manufacturing. important role in related fields. Compliant hinges use the characteristics of easy deformation of the weak parts in the structure and the reversible elastic deformation characteristics of the material itself to realize the required kinematic functions. It has the advantages of no assembly, zero clearance, no friction and no lubrication. At present, the rigid body replacement method is mainly used to design the compliant mechanism,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C99/00G05D3/00
CPCB81C99/0025G05D3/00
Inventor 王瑞洲王晗董永超
Owner GUANGDONG UNIV OF TECH
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