Auxiliary heating furnace door system for heat treatment equipment

Abstract

The invention discloses an auxiliary heating furnace door system for heat treatment equipment, including a furnace door. An electric heater is arranged on the inner side of the furnace door. The electric heater is equipped with a power supply module, a temperature sensor for detecting the temperature of the furnace mouth area of heat treatment equipment, and a regulation component for regulating the heating power of the electric heater. The power supply module is connected with the electric heater through the regulation component. The temperature sensor is connected with the regulation component. The system has the advantages as follows: the structure is simple; temperature return after opening/closing of the furnace door is fast; the stability and consistency of the temperature field aregood; and the product quality is ensured, and the production efficiency is improved.

Description

technical field [0001] The invention relates to heat treatment equipment such as diffusion furnaces, oxidation furnaces and annealing furnaces for manufacturing power electronic devices, semiconductor devices and crystalline silicon solar cells, and in particular to an auxiliary heating furnace door system for heat treatment equipment. Background technique [0002] The heat treatment process is widely used in the manufacture of power electronic devices, semiconductor devices and crystalline silicon solar cells. The heat treatment equipment completes various heat treatment processes by forming a stable process temperature, process pressure and reactant process environment through batch workpiece attachments in the reaction tube. The stability and consistency of the temperature field in the process environment directly determines the quality of the product and the yield of batch products. [0003] With the development of the device manufacturing industry, the requirements for ...

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Problems solved by technology

[0003] With the development of the device manufacturing industry, the requirements for product quality and production efficiency are getting higher and higher. Due to the opening and closing of the furnace door mechanism, traditional heat treatment equipment has slow temperature recovery and low production efficiency, which is difficult to meet the needs of mass production; Poor heat preservation performance of the furnace mouth, uncontrollable temperature in the furnace mouth area, poor stability of the temperature field caused by the interference of the external environment on the furnace mouth area of ​​the reaction tube, resulting in a low yield rate of batch products, and it is difficult to meet the process requirements of high-quality product production

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