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Release treatment method, mold and anti-reflection film

A mold release treatment and mold technology, applied in the field of molds, anti-reflection films, and mold release treatment methods, can solve problems such as reduced mold release properties, and achieve the effect of improving sustainability.

Active Publication Date: 2021-07-27
SHARP KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although fluorine-based mold release agents have better mold release properties than other mold release agents such as silicone-based mold release agents, the mold release properties deteriorate rapidly in the continuous manufacturing process using the roll-to-roll method.

Method used

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  • Release treatment method, mold and anti-reflection film
  • Release treatment method, mold and anti-reflection film
  • Release treatment method, mold and anti-reflection film

Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0124] A mold sample of Experimental Example 1 was obtained as described below.

[0125] A pellet mold (5 cm x 10 cm plate shape) having a porous alumina layer on the surface was prepared. The chip mold is made by sputtering an aluminum film with a thickness of 1 μm on a glass substrate with a thickness of 5 mm as the base material of the mold. Figure 5 Anodization and etching are repeated by the method described.

[0126] After washing the surface of the chip mold with water and blowing nitrogen, a precursor solution containing a silicon oxide precursor was supplied to the surface. Precursor solution use: Utilize PGMEA to OCD T-12 1200V (with PGMEA (propylene glycol monomethyl ether acetate) will (HSiO 1.5 ) n The solution obtained by diluting 5 times) The solution obtained by diluting 5 times. The precursor solution was supplied to the surface of the die by spin coating at 2000 rpm for 30 seconds. Next, in order to remove the solvent (PGMEA) contained in the precursor ...

experiment example 2

[0158] In Experimental Example 2, it was found that the same effect was obtained by using a different releasing agent from Experimental Example 1 as the releasing agent containing a fluorine-based silane coupling agent.

[0159] The mold sample of Experimental Example 2 differs from Experimental Example 1 in the mold release agent used for the mold release treatment. The release agent used in Experimental Example 2 contained a perfluoropolyether group-containing compound similarly to the release agent used in Experimental Example 1. However, the release agent used in Experimental Example 1 had one functional group containing silane in the molecule, whereas the release agent used in Experimental Example 2 had a plurality of functional groups containing silane in the molecule. The mold samples of Experimental Example 2 were also evaluated in the same manner as in Experimental Example 1. The evaluation results are shown in Table 3 below. In addition, in Table 3, the part which ...

experiment example 3

[0172] In Experimental Example 3 (Experimental Example 3a-Experimental Example 3h), a mixed material comprising an inorganic material and an organic material is used as a precursor solution of an insulating layer precursor to perform a mold release treatment as a precursor solution of an insulating layer, and combined with Experimental example 1 and experimental example 2 were compared using the precursor solution containing the silicon oxide precursor which does not contain carbon. In addition, the effect of the organic material contained in the precursor and the organic material contained in the formed insulating layer were studied by performing a release treatment using precursor solutions having different organic material content in the precursor.

[0173] The mold sample of Experimental Example 3 is different from Experimental Example 2 in that the mold release process is performed using a mixed material including an inorganic material and an organic material as a precurso...

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Abstract

The present invention provides a novel release treatment method for continuously improving the release performance of a mold having a porous alumina layer on the surface, a release-treated mold, and an antireflection film. The release treatment method includes: Step A, preparing a mold (100) with a porous aluminum oxide layer (14) on the surface, a precursor solution (21) containing a silicon oxide precursor and a solvent, and a release agent containing a fluorine-based silane coupling agent. Molding agent; step B, the precursor solution is provided to the surface; step C, after step B, the solvent contained in the precursor solution provided to the surface is at least reduced; step D, after step B, by providing to the The silicon oxide precursor contained in the precursor solution on the surface is calcined to form an insulating layer (22) comprising silicon oxide and substantially free of carbon; step E, which provides release to the surface after step C and step D agent.

Description

technical field [0001] The invention relates to a demoulding treatment method, a mold and an anti-reflection film. The so-called "mold" here includes molds that can be used in various processing methods (stamping or casting), and are sometimes called dies. In addition, it can also be used for printing (including nano printing). Background technique [0002] It can be used in optical elements such as display devices such as televisions and mobile phones, or camera lenses, and anti-reflection technology is usually implemented to reduce surface reflection and increase light transmission. This is because, for example, when light passes through an interface between media with different refractive indices, such as when light is incident on an interface between air and glass, the amount of light transmitted due to Fresnel reflection or the like decreases and visibility decreases. [0003] In recent years, as an antireflection technology, a method of forming a fine concave-convex ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B29C41/04B29C41/38B29C33/38B29C33/64B29L11/00
CPCB29C33/3842B29C33/64B29C41/04B29C41/38B29L2011/00
Inventor 中松健一郎
Owner SHARP KK