Release treatment method, mold and anti-reflection film
A mold release treatment and mold technology, applied in the field of molds, anti-reflection films, and mold release treatment methods, can solve problems such as reduced mold release properties, and achieve the effect of improving sustainability.
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experiment example 1
[0124] A mold sample of Experimental Example 1 was obtained as described below.
[0125] A pellet mold (5 cm x 10 cm plate shape) having a porous alumina layer on the surface was prepared. The chip mold is made by sputtering an aluminum film with a thickness of 1 μm on a glass substrate with a thickness of 5 mm as the base material of the mold. Figure 5 Anodization and etching are repeated by the method described.
[0126] After washing the surface of the chip mold with water and blowing nitrogen, a precursor solution containing a silicon oxide precursor was supplied to the surface. Precursor solution use: Utilize PGMEA to OCD T-12 1200V (with PGMEA (propylene glycol monomethyl ether acetate) will (HSiO 1.5 ) n The solution obtained by diluting 5 times) The solution obtained by diluting 5 times. The precursor solution was supplied to the surface of the die by spin coating at 2000 rpm for 30 seconds. Next, in order to remove the solvent (PGMEA) contained in the precursor ...
experiment example 2
[0158] In Experimental Example 2, it was found that the same effect was obtained by using a different releasing agent from Experimental Example 1 as the releasing agent containing a fluorine-based silane coupling agent.
[0159] The mold sample of Experimental Example 2 differs from Experimental Example 1 in the mold release agent used for the mold release treatment. The release agent used in Experimental Example 2 contained a perfluoropolyether group-containing compound similarly to the release agent used in Experimental Example 1. However, the release agent used in Experimental Example 1 had one functional group containing silane in the molecule, whereas the release agent used in Experimental Example 2 had a plurality of functional groups containing silane in the molecule. The mold samples of Experimental Example 2 were also evaluated in the same manner as in Experimental Example 1. The evaluation results are shown in Table 3 below. In addition, in Table 3, the part which ...
experiment example 3
[0172] In Experimental Example 3 (Experimental Example 3a-Experimental Example 3h), a mixed material comprising an inorganic material and an organic material is used as a precursor solution of an insulating layer precursor to perform a mold release treatment as a precursor solution of an insulating layer, and combined with Experimental example 1 and experimental example 2 were compared using the precursor solution containing the silicon oxide precursor which does not contain carbon. In addition, the effect of the organic material contained in the precursor and the organic material contained in the formed insulating layer were studied by performing a release treatment using precursor solutions having different organic material content in the precursor.
[0173] The mold sample of Experimental Example 3 is different from Experimental Example 2 in that the mold release process is performed using a mixed material including an inorganic material and an organic material as a precurso...
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