Exhaust gas adsorption regeneration gas condensation system and method

A technology of condensing system and regeneration gas, applied in the direction of steam condensation, separation method, chemical instrument and method, etc., can solve the problems of silicon powder blockage and obstruction, and achieve the effect of saving energy, enhancing safety, and reducing the number of maintenance.

Pending Publication Date: 2019-04-12
内蒙古通威高纯晶硅有限公司
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

Bring silicon powder feeding to form blockage or blockage

Method used

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  • Exhaust gas adsorption regeneration gas condensation system and method
  • Exhaust gas adsorption regeneration gas condensation system and method
  • Exhaust gas adsorption regeneration gas condensation system and method

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Embodiment Construction

[0031] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with specific embodiments.

[0032] like Figure 1-Figure 4 As shown, the present invention provides a tail gas adsorption regeneration gas condensation system, including a pre-heat exchanger 1, a heat exchange condenser 2, and a gas-liquid separator 3 connected in sequence; the gas separated by the gas-liquid separator 3 is used as a pre-heater Cooling medium in heat exchanger 1.

[0033] In the specific implementation process, the pre-heat exchanger 1 can be selected from the following structure: it includes a horizontal cylindrical shell 11, and the two ends of the shell 11 are closed; the shell 11 is radially provided with two front and rear sealing plates 12; A number of heat exchange tubes 13 are arranged between the sealing plates 12, and both ends of the heat exchange tu...

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Abstract

The invention discloses an exhaust gas adsorption regeneration gas condensation system and a method. The system comprises a preheating exchanger, a heat exchange condenser and a gas-liquid separator which are connected in sequence; a gas separated by the gas-liquid separator is used as a cooling medium in the preheating exchanger. The gas-liquid separation is carried out by preheating exchange andheat exchange condensation, which greatly improves the condensation effect of chlorosilane. The blockage and jamming of cold hydrogenated silicon powder blanking are reduced; the number of inspectionis reduced, and labor costs are saved; the safety, stability and continuous production capacity of cold hydrogenation equipment are enhanced; the entry of trichlorosilane into a cold hydrogenation fluidized bed is significantly reduced, and the energy is saved.

Description

technical field [0001] The invention relates to a system and method for condensing chlorosilane in tail gas and adsorption regeneration gas in cold hydrogenation silicon production process. Background technique [0002] The Siemens process of improving polysilicon production by the Siemens method is based on the principle of reducing high-purity trichlorosilane with high-purity hydrogen on a high-purity silicon core at a temperature of about 1100 ° C to generate polysilicon and deposit it on the silicon core. The improved Siemens process is based on the traditional Siemens process, and it also has energy saving, consumption reduction, and recycling of a large amount of H produced during the production process. 2 , HCI, SiCI 4 And other by-products and a supporting process for a large amount of by-product heat. At present, most manufacturers in the world use the improved Siemens method to produce polysilicon. [0003] The existing adsorption column regeneration hydrogen, d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D5/00B01D53/00
CPCB01D5/0003B01D5/0036B01D5/0039B01D5/0054B01D53/002
Inventor 乌力吉甘居富游书华彭中王亚萍
Owner 内蒙古通威高纯晶硅有限公司
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