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Electroplating mould and method for manufacturing same

A mold and multi-mold technology, applied in the direction of electroforming, electrolysis process, 3D image production, etc., can solve problems such as difficult geometric shape of photoresist, hindering the stable manufacture of watch parts, etc.

Active Publication Date: 2019-04-16
NIVAROX FAR
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] Furthermore, it is difficult to ensure that the photoresist maintains its geometry (perpendicularity, dimensions, etc.) in the plating bath, which prevents the robust fabrication of these specific timepiece components

Method used

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  • Electroplating mould and method for manufacturing same
  • Electroplating mould and method for manufacturing same
  • Electroplating mould and method for manufacturing same

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Embodiment Construction

[0036] refer to Figures 1 to 5 , the invention relates to a method for producing a micromechanical component 1, 1' by electroplating. The method preferably comprises a method for manufacturing a mold 3, 3', followed by an electroplating step and a step of releasing the part 1, 1' respectively from said mold 3, 3'.

[0037] The method of manufacturing a mold 3, 3' according to the invention comprises successive steps for manufacturing a mold 3, 3':

[0038] A first step a) of the method of manufacturing a mold 3, 3' consists in providing a first substrate 5 made of photosensitive glass with a thickness at least equal to the height of the mould.

[0039] Such photosensitive glass is available, for example, from Schott A.G. (Schott group company) under the trade name Or from Hoya Corp. under the trade name Or from LifeBioScience Inc. (Baisai Biotechnology Co., Ltd.) under the trade name ApexTM TM get.

[0040] Advantageously according to the invention, the use of photosens...

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Abstract

A process for manufacturing a mould (3, 3') including: a) providing a first substrate (5) made of photosensitive glass of thickness of at least equal to the height of the mould (3, 3'), b) illuminating the first substrate (5) with UV rays through a mask the windows of which correspond to the depression of the mould (3, 3') in order to create illuminated zones(7, 7'), c) carrying out a heat treatment on the first substrate (5) obtained in step b) in order to crystallize the illuminated zones, d) providing a second substrate (8) having at least one conductive layer (10) on its surface, e) joining the first substrate (5) obtained in step c) with the second substrate (8) so that the conductive layer (10) is located between the first substrate (5) and the second substrate (8), f) removing theilluminated and crystallized zones (7, 7') of the first substrate (5) so as to uncover the conductive layer(10), forming a cavity with sidewalls and a bottom occupied by the conductive layer of the mould (3, 3'). The invention relates to the field of micromechanical components, in particular for timepiece movements.

Description

technical field [0001] The invention relates to a mold for producing micromechanical components by electroplating and a method for producing the same. Background technique [0002] Electroplating has been used and known for a long time. The LIGA method (LIGA is the German expression " Lithographie, Galvanoformung & Abformung (the famous abbreviation of Lithographie, Galvanoformung & Abformung) was developed in the 80s and has proven to be very beneficial for the fabrication of high-precision metal microstructures. [0003] The principle of LIGA technology is to deposit a photoresist layer on a conductive substrate or a substrate covered with a conductive layer; perform X-ray irradiation through a synchrotron through a mask corresponding to the outline of the desired microstructure; Sections of the subbing layer are developed, ie removed by physical or chemical means, to define a mold with the contours of the microstructure; a metal, usually nickel, is galvanically deposit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D1/00C25D1/10
CPCC25D1/003C25D1/10C03C4/04C25D1/00C25D1/22G03F7/0015G03F7/0037G03F7/38G03F7/0043G03F7/32G03F7/40C25D5/10
Inventor M·韦拉尔多A·甘德尔曼M·夏布洛兹P·屈赞
Owner NIVAROX FAR