A fully decoupled three-degree-of-freedom micromechanical gyroscope

A technology of micro-mechanical gyroscope and degree of freedom, which is applied in gyroscope effect for speed measurement, gyroscope/steering sensing equipment, speed/acceleration/shock measurement, etc. It can solve the difficulty of decoupling structure design, low sensitivity, poor stability, etc. problem, to achieve the effect of improving stability, improving sensitivity, and improving system bandwidth

Active Publication Date: 2021-08-13
NORTHEASTERN UNIV LIAONING
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  • Application Information

AI Technical Summary

Problems solved by technology

The advantage of using a single-degree-of-freedom vibration structure for two modes at the same time is that frequency matching can improve sensitivity, but it will cause severe mechanical coupling and poor stability; while using a two-degree-of-freedom vibration structure can improve stability, but lower sensitivity , the design of the decoupling structure is more difficult

Method used

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  • A fully decoupled three-degree-of-freedom micromechanical gyroscope
  • A fully decoupled three-degree-of-freedom micromechanical gyroscope
  • A fully decoupled three-degree-of-freedom micromechanical gyroscope

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Embodiment Construction

[0016] The present invention is described in more detail below in conjunction with accompanying drawing example:

[0017] combine figure 1 The structure of the present invention mainly includes a driving frame 1 , a decoupling mass 2 , a dynamic driving comb 5 and a static driving comb 7 , a detection frame 3 , a sensitive mass 4 , a dynamic sensitive comb 6 and a static sensitive comb 8 . The driving unit composed of the dynamic driving comb 5 and the static driving comb 7 is arranged on the driving frame 1, the driving frame 1 is connected with the anchor point 13 through the spring beam 9a, and the driving frame 1 and the decoupling mass 2 are connected through the spring beam Two 10b are connected, and the decoupling mass 2 and the detection frame 3 are connected through the spring beam five 9b, thereby forming the driving mode of the micromechanical gyroscope. Decoupling mass 2 and detection frame 3 are connected by spring beam 5 9b, detection frame 3 and anchor point 2 ...

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Abstract

The invention discloses a fully decoupled three-degree-of-freedom micro-mechanical gyroscope, which improves the mechanical decoupling performance of the micro-mechanical gyroscope. The micromechanical gyroscope structure of the present invention includes a single-degree-of-freedom driving mode and a complete two-degree-of-freedom sensitive mode, and is respectively connected to the driving frame and the detection frame through the decoupling mass block, and simultaneously realizes the mechanical solution of the driving mode and the sensitive mode coupling and energy conversion. The complete two-degree-of-freedom structure can increase the stable bandwidth of sensitive modes and improve the stability and anti-interference ability of the gyro system. The invention has the advantages of mechanical decoupling, good stability and anti-interference, and works under normal pressure, which is beneficial to actual processing and application.

Description

technical field [0001] The invention belongs to the technical field of micromechanics, and relates to a fully decoupled micromechanical gyroscope structure with three degrees of freedom. Background technique [0002] Micromechanical gyroscope is the third generation gyroscope developed on the basis of the development of silicon microelectromechanical technology. Compared with the first generation mechanical rotor gyroscope and the second generation optical gyroscope, the micromechanical gyroscope has the advantages of small size, light weight, low cost, The advantages of low power consumption, high reliability, and strong shock resistance are suitable for mass production. Therefore, micro-mechanical gyroscopes are widely used in aerospace, micro-inertial navigation systems, automotive industry, guided bombs, robotics, and consumer electronics. [0003] With the continuous development of micromachined gyroscopes, the research of micromachined gyroscopes mainly focuses on two ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656G01C19/5663
CPCG01C19/5656G01C19/5663
Inventor 吕晓永李文杰胡晟单鹏沙晓鹏谭雁清
Owner NORTHEASTERN UNIV LIAONING
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