Piezoelectric sensing chip, piezoelectric sensor and preparation method of piezoelectric sensing chip

Abstract

The invention provides a piezoelectric sensing chip, a piezoelectric sensor and a preparation method of the piezoelectric sensing chip. The piezoelectric sensing chip includes a piezoelectric materiallayer and an electrode layer which is arranged on the surface of the piezoelectric material layer in a press fit mode, wherein the piezoelectric material layer is divided into a measuring region anda non-measuring region, and the thickness of the measuring region is less than that of the non-measuring region. The thickness of the measured region in the piezoelectric material layer is set to be less than that of the non-measuring region, and that is, thinning treatment is conducted on the corresponding measuring region in the piezoelectric material layer; the resonance frequency of the measuring region in the piezoelectric material layer can be improved by thinning the measuring region, and thus the measuring sensitivity of the piezoelectric sensing chip is improved; and in addition, thethickness of the non-measuring region of the piezoelectric material layer remains unchanged, the hardness of the piezoelectric sensing chip can be guaranteed, it is ensured that the piezoelectric chiphas the characteristic of high fundamental frequency resonance frequency, and it is ensured that the prepared piezoelectric chip has the characteristics of being easy to clamp and use and the like atthe same time.

Description

technical field [0001] The invention relates to the technical field of biological sensing, in particular to a piezoelectric sensing chip, a piezoelectric sensor and a manufacturing method thereof. Background technique [0002] Biosensing technology is a high-tech that has grown through the interpenetration of various disciplines such as biology, chemistry, physics, medicine, and electronic technology. It has important application value in the fields of biomedicine, environmental monitoring, food, medicine, and military medicine. . Among them, the piezoelectric sensor chip has a wide range of applications in the biological field due to its unique properties. It is mainly used in the field of biological life analysis to achieve high-sensitivity detection and analysis of molecular interactions, kinetic studies, cell adsorption, migration changes, drug effects, and key and screening of biomolecules. It can also be used in petroleum, chemical, aerospace, etc. and other fields. ...

AI Technical Summary

Problems solved by technology

[0005] What the present invention aims to solve is the defect in the prior art that the measurement sensitivity of the piezoelectric sensor chip is low due to the thickness of the piezoelectric material

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