Internally heated getter pump

A getter pump, internal heating technology, applied in the direction of pumps, liquid variable capacity machinery, machines/engines, etc., can solve the problems of insufficient activation, uneven heating, etc., to achieve sufficient and uniform activation, high heating efficiency, and improved The effect of stability

Active Publication Date: 2019-04-26
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The built-in heating wire is used for activation, which can effectively improve the heating efficiency and improve the problems of uneven heating and insufficient activation

Method used

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  • Internally heated getter pump
  • Internally heated getter pump
  • Internally heated getter pump

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Embodiment Construction

[0022] In order to make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below with reference to the accompanying drawings in the embodiments of the present invention. Throughout the drawings, the same or similar reference numbers refer to the same or similar elements or elements having the same or similar functions. The described embodiments are some, but not all, of the embodiments of the present invention. The embodiments and directional words described below with reference to the accompanying drawings are all exemplary, and are intended to be used to explain the present invention, but should not be construed as limiting the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present ...

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Abstract

The invention relates to an internally heated getter pump. The pump comprises a plurality of air suction elements 1, a supporting body, positioning plates 5 and a base 6. The supporting body comprisesa central supporting bar 2 and a cylindrical hollowed-out thin shell 4. The central supporting bar 2 is connected with the cylindrical hollowed-out thin shell 4 through one positioning plate 5. The positioning plates 5 and the cylindrical hollowed-out thin shell 4 are fixed to the base 6 through the central supporting bar 2. A pump body is provided with the multiple air suction elements 1 which are uniformly fixed to the positioning plates 5 through thin metal bars 11 correspondingly. The base 6 is a high vacuum CF flange and is connected with the pump body central supporting bar 2 in a threaded form and connected with heating systems and thermocouples in the pump body and an external power supply by embedding four vacuum electrodes 7 in the base through kovar alloy. The internally heatedgetter pump provided by the invention adopts the internal heating column shaped air suction elements and is high in heating efficiency, uniform in exciting and high in air suction speed.

Description

technical field [0001] The invention relates to an internal heating type getter pump, which belongs to the technical field of vacuum. Can be used to obtain or maintain ultra-high vacuum. Background technique [0002] The getter pump gets rid of the traditional configuration of the vacuum pump, and uses the alloy material as the getter combined with the active gas, which can remove the main residual gas hydrogen and carbon monoxide in the ultra-high vacuum system, so as to obtain and maintain the ultra-high vacuum degree of the system. It has a series of advantages such as high pumping speed, clean and oil-free, no moving parts, no vibration, room temperature pumping, and low energy consumption. [0003] The early structure of the getter pump is to roll or coat the getter material on the metal nickel or nickel-plated iron base strip. This structure has a larger gettering area and a higher gettering speed. However, the vibration resistance of the getter material is poor, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/02F04B37/04
CPCF04B37/02F04B37/04
Inventor 郭德宇王禄禄徐晓强杨志民
Owner GRIMAT ENG INST CO LTD
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