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Manufacturing method of mask component, mask component

A component and mask technology, which is applied in the field of mask component preparation, can solve problems such as deformation or displacement, low alignment accuracy between mask component and substrate, etc.

Active Publication Date: 2020-12-18
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the shortcomings of the existing methods, the present application proposes a method for preparing a mask assembly and a mask assembly to solve the problem that the preparation process of the mask assembly in the prior art causes deformation or displacement of each alignment mark, resulting in evaporation The technical problem of low alignment accuracy between the mask component and the substrate

Method used

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  • Manufacturing method of mask component, mask component
  • Manufacturing method of mask component, mask component
  • Manufacturing method of mask component, mask component

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Embodiment Construction

[0038] The present application is described in detail below, and examples of embodiments of the present application are shown in the drawings, wherein the same or similar reference numerals represent the same or similar components or components having the same or similar functions throughout. Also, detailed descriptions of known technologies will be omitted if they are not necessary to illustrate the features of the present application. The embodiments described below by referring to the figures are exemplary only for explaining the present application, and are not construed as limiting the present application.

[0039] Those skilled in the art can understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meanings as commonly understood by those of ordinary skill in the art to which this application belongs. It should also be understood that terms, such as those defined in commonly used dictionaries, should ...

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PUM

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Abstract

Embodiments of the present application provide a method for manufacturing a mask assembly and a mask assembly. The method includes: after the shielding layer is stretched and aligned, it is fixedly arranged on one side of the frame; in the fixedly arranged shielding layer and the frame, at least one stretching alignment hole and at least one steaming hole are opened. Plating alignment marks; according to the stretching alignment holes, after stretching and aligning the mask plate, it is fixedly arranged on the side of the shielding layer away from the frame; in the fixedly arranged mask plate At least one vapor deposition alignment mark is opened to obtain a mask component. The embodiment of the present application can effectively reduce the influence of the stretching operation on the holes on the components constituting the mask assembly during the preparation process of the mask assembly, maintain the shape and position of the hole to a large extent, and improve the mask assembly. Assembly precision. And improve the precision of vapor deposition.

Description

technical field [0001] The present application relates to the field of vapor deposition technology, and in particular, the present application relates to a method for preparing a mask assembly and a mask assembly. Background technique [0002] During the production process of the display panel, the evaporation of the luminescent material needs to be realized through the mask component. In order to ensure the precise assembly of the mask assembly and the accuracy of the vapor deposition position, various holes for realizing different functions are often provided on the components constituting the mask assembly. [0003] For example, if figure 1 As shown, a mask assembly in the prior art includes Frame (frame), Blocking (blocking layer), Align Mask (alignment mask) and FMM sheet (Fine metal mask sheet, high-precision metal mask plate). Frame, Blocking, Align Mask and FMM sheet complete the processing of alignment marks such as alignment holes and detection mark openings in t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042B23K26/60C23C14/24G03F7/2063H01L21/027H01L21/682H01L23/544H10K71/20
Inventor 罗昶杨晓宇嵇凤丽
Owner BOE TECH GRP CO LTD