Infrared gas sensor with piezoelectric micropump and turbulent flow structure
A technology of gas sensors and infrared detectors, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of insufficient response speed and accuracy of infrared respiratory gas sensors, and achieve the effect of increasing the diffusion speed
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[0022] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0023] Such as figure 1 As shown, the components of the entire infrared gas sensor include piezoelectric micropump 1, spoiler 2, cross gas chamber 3, sensitive source fixed structure 4, infrared sensitive element 5, light source fixed structure 6, infrared light source 7 and Fully transparent infrared glass8.
[0024] Two cylinder-shaped cavities were dug out longitudinally and transversely from the cuboid metal block made of aluminum alloy by machining, and the inner diameters were 9mm and 2mm respectively. The cavity with an inner diameter of 9mm will be used as an air chamber, and the cavity with an inner diameter of 2mm will be the air inlet and outlet. Cut out a cuboid cavity of 1mm*9mm*10mm at the 1mm section of the 9mm cavity close to the air inlet direction to place the spoiler.
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