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Integrated high-precision flexible temperature sensor and preparation method thereof

A temperature sensor and high-precision technology, applied in the field of sensors, can solve the problems of low measurement accuracy and large deformation of flexible substrates, and achieve the effect of digital temperature signal output, weakening the influence of deformation, and improving the temperature output signal

Active Publication Date: 2019-05-31
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide an integrated high-precision flexible temperature sensor and its preparation method, which solves the technical problem of low measurement accuracy of the current flexible temperature sensor due to large deformation of the flexible substrate

Method used

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  • Integrated high-precision flexible temperature sensor and preparation method thereof
  • Integrated high-precision flexible temperature sensor and preparation method thereof
  • Integrated high-precision flexible temperature sensor and preparation method thereof

Examples

Experimental program
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preparation example Construction

[0046] A method for preparing an integrated high-precision flexible temperature sensor, comprising the following steps:

[0047] Step 1: Prepare a double-sided flexible substrate 1 with square bosses by casting multiple times on a mold with grooves;

[0048] Step 2: preparing a metal film on the square boss, and using a stripping process to obtain a temperature sensitive unit 301 and a temperature compensation unit 302 for the metal film;

[0049] Step 3: Prepare a protective layer 4 on the upper surface of the temperature sensitive unit 301 and the lower surface of the temperature compensation unit 302 by using a spin coating process;

[0050]Step 4: Paste the microcircuit chip 5 and the power supply unit 6 on the non-square boss area of ​​the flexible substrate 1, and realize the microcircuit chip 5, the power supply unit 6, the temperature sensitive The electrical connection between the unit 301 and the temperature compensation unit 302.

Embodiment 1

[0053] An integrated high-precision flexible temperature sensor provided by a preferred embodiment of the present invention includes a flexible substrate 1, the thickness of the flexible substrate 1 can be conventional, and bosses are symmetrically arranged on the upper and lower surfaces of the flexible substrate 1 , that is, the upper surface of the flexible substrate 1 is provided with a boss A201, and the lower surface of the flexible substrate 1 is provided with a boss B202 symmetrically arranged with the boss A201. The boss and the flexible substrate 1 are integrally formed and are square , it is convenient for the temperature sensitive unit 301 and the temperature compensating unit 302 to be pasted together. When the height of the boss is 30 μm, it is most beneficial to reduce the influence of deformation on the measurement signal of the flexible temperature sensor. A temperature sensitive unit 301 is pasted on the upper surface of the boss A201, a temperature compensati...

Embodiment 2

[0056] Based on Embodiment 1, this embodiment is used to describe the structures of the temperature sensitive unit and the temperature compensation unit.

[0057] Both the temperature sensitive unit 301 and the temperature compensation unit 302 are Pt metal resistors, a temperature sensitive resistor with a common structure can be used, but a double helix structure is more optimal, and the double helix structure is Figure 5 As shown, the double helix structure can effectively eliminate the influence of deformation in any direction in the horizontal plane. The principle is as follows:

[0058] According to the definition of strain and Poisson's law, from Figure 5 It is easy to know that the isolated segment dI of the circular metal strip (temperature sensitive unit or temperature compensation unit) and the horizontal direction angle θ is strained in the horizontal direction ε x The relative change in resistance is:

[0059]

[0060] Then the relative resistance change of...

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Abstract

The invention, which belongs to the field of flexible sensors, discloses an integrated high-precision flexible temperature sensor comprising a flexible substrate. Bosses are arranged on the upper surface and the lower surface of the flexible substrate symmetrically, wherein the height of each boss is 25 to 35 microns. Temperature sensitive units are arranged on the bosses on the upper surface of the flexible substrate and temperature compensation units are arranged on the bosses on the lower surface of the flexible substrate; and the temperature sensitive units and the temperature compensationunits are connected in series. Therefore, the influence caused by the deformation of the flexible substrate is reduced effectively; and the accuracy of the flexible sensor is improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an integrated high-precision flexible temperature sensor and a preparation method thereof. Background technique [0002] A temperature sensor refers to a device or device that can convert temperature into an electrical signal that can be easily measured and processed. [0003] Traditional temperature sensors have large volume, weight and power consumption and rigid structure, while flexible temperature sensors can be bent and stretched, light and small, and can be used in wearable devices. However, the current flexible temperature sensors at home and abroad have the following problems: [0004] 1. The deformation of the flexible substrate is huge, which seriously interferes with the accuracy of the temperature measurement results, that is, the measurement results are very different when the device is deformed and when it is not deformed. This is a common technical problem faced ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/18
Inventor 黎威志熊丽刘杨张天高若尧杜晓松太惠玲
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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