A tool coating turntable device for a high vacuum multi-arc ion coating machine
A multi-arc ion coating machine technology, applied in vacuum evaporation coating, ion implantation coating, sputtering coating, etc., can solve the problem of gear stuck coating time, inconsistency, etc., and achieve simple and simple structure of the device , Improve the effect of convenience
Active Publication Date: 2021-04-27
SHAANXI SCI TECH UNIV
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Problems solved by technology
[0004] The purpose of the present invention is to provide a tool coating turret device of a high vacuum multi-arc ion coating machine, to solve the problems of gear stuck and inconsistent coating time in the prior art
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[0024] The tool coating turret device structure of a high vacuum multi-arc ion coating machine provided by the present invention is as follows: figure 1 As shown, the lower turntable 15 and the upper turntable 11 (as shown in Fig. image 3 shown), the lower turntable 15 (as figure 2 As shown), there is a U-shaped through hole with a circle of central symmetry at the edge position, and a lower bearing 4 is arranged along the vertical direction of the U-shaped through hole. The lower bearing 4 is connected to the lower transmission shaft 3, and the lower end of each lower transmission shaft 3 is nested. The pinion 2, the pinion 2 meshes on the fixed bull gear 1 located at the center position below the lower turntable 15; the lower transmission shaft 3 is connected with an upper transmission shaft 9, and the upper part of the upper transmission shaft 9 is nested and arranged on the workpiece turntable 7; Several uniformly distributed workpiece seats 8 are arranged on the workpi...
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A tool coating turret device for a high-vacuum multi-arc ion coating machine disclosed by the present invention includes a lower turntable and an upper turntable arranged up and down opposite to each other. A circle of centrally symmetrical U-shaped through holes is arranged at the edge of the lower turntable. The through hole is provided with lower bearings in the vertical direction, and the lower bearings are connected to the lower transmission shafts. A pinion is nested at the lower end of each lower transmission shaft. The upper transmission shaft is nested on the workpiece turntable. The workpiece seat is set on the workpiece turntable. There are several evenly distributed self-rotating gears under the workpiece seat. A circle of evenly distributed support columns is fixed between the upper turntable and the lower turntable. The column is located on the inner side of the lower transmission shaft or the upper transmission shaft, and each support column is also provided with a lever frame, and one end of the lever frame is in contact with the rotation gear. This device has successfully solved the technical problems of complex structure of traditional revolution and rotation devices and unstable rotation speed of the turret under high temperature.
Description
technical field [0001] The invention belongs to the technical field of high vacuum arc ion plating devices, and relates to a tool coating turntable device of a high vacuum multi-arc ion coating machine. Background technique [0002] The tool coating turret device of the high vacuum multi-arc ion coating machine is a kind of kinematic mechanism used to clamp the tool. The kinematic mechanism is driven by a frequency conversion motor to realize the revolution and rotation of the workpiece. The movement mode of the movement mechanism is usually double and triple movement. It is used for the movement mechanism of the high vacuum coating machine. It is mainly composed of power transmission gear, upper gear, lower gear support, lower gear and lower gear support. The movement The mechanism mainly realizes the stable revolution and rotation of the workpiece through the meshing of the gears. During coating, the rotation of the upper gear through the rotation of the frequency conversi...
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IPC IPC(8): C23C14/32C23C14/50
Inventor 叶伟
Owner SHAANXI SCI TECH UNIV