Anti-collision device, workpiece table and exposure device
A technology of an anti-collision device and a workpiece table, applied in the field of workpiece table, exposure device, and anti-collision device, can solve the problems of low anti-collision capability, large weight, and large space occupation, and achieve light weight, space saving, and small space occupation. Effect
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Embodiment 1
[0028] refer to Figure 1-Figure 2 , which is a schematic diagram of the anti-collision device provided in this embodiment, the anti-collision device 2 is installed on the edge of the workpiece table 1, the anti-collision device 2 includes a roller 21 and a shaft assembly, and the roller 21 is sleeved on the Outside the rotating shaft assembly, the roller 21 can rotate relative to the workpiece table 1 . The anti-collision device 2 is installed on the edge of the workpiece table 1, which can save a lot of space inside the workpiece table 1; the roller 21 is sleeved outside the shaft assembly. On the edge of the workpiece table 1, it is guaranteed that the parts that collide are always the anti-collision device 2, and the rollers in the anti-collision device 2 can rotate to absorb the collision energy and avoid damage to the precision parts in the workpiece table, and the anti-collision device 2. It takes up little space and is light in weight, and it can also realize the anti-...
Embodiment 2
[0037] see figure 2, the difference from Embodiment 1 is that in this embodiment, the rotating shaft body 22 is flexible, the rotating shaft support member 23 is rigid, the roller 21 is sleeved on the flexible rotating shaft body 22 and fixed, and the rotating shaft supports Parts 23 are arranged at both ends of the rotating shaft main body 22 and protrude into the mounting holes on the workpiece table 1 to connect the rotating shaft main body 22 with the workpiece table 1 .
[0038] The roller 21 is fixed with the main body 22 of the rotating shaft, and the supporting member 23 of the rotating shaft extends into the installation hole. Collision device 2, after roller 21 is bumped, can drive rotating shaft support 23 to rotate in mounting hole, to absorb collision energy, avoids damaging the precision parts in workpiece table 1, also can prevent the side wall of workpiece table 1 from being scratched. Moreover, when a collision occurs, since the rotating shaft main body 22 i...
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