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Novel silicon controlled rectifier

A thyristor, a new type of technology, applied in electrical components, electric solid devices, circuits, etc., can solve the problems of gate oxide layer protection not working well, slow thyristor opening speed, low maintenance voltage, etc. Save the layout area, reduce the starting voltage, and improve the effect of maintaining the voltage

Pending Publication Date: 2019-06-07
ZHEJIANG UNIV KUNSHAN INNOVATION INST
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the thyristor has the advantages of high robustness and simple structure, but the thyristor also has the disadvantages of slow turn-on speed, high turn-on voltage, and low maintenance voltage, which cannot protect the gate oxide layer of the MOS transistor at the input and output ends of the integrated circuit. play a very good effect

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Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, and are not intended to limit the protection scope of the present invention.

[0029] The application principle of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0030] Such as Figure 1-2 As shown, a new type of thyristor can be realized by standard FinFet process, which includes:

[0031] A substrate 1, which is provided with an N well 2 and a P well 3 along its length direction (Y-axis direction); preferably, the substrate 1 is a P-type substrate 1;

[0032] The first P+ implantation region 4 and the first N+ implantation region 5 are arranged in sequence along the width direction (X-axis direction)...

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Abstract

The invention discloses a novel silicon controlled rectifier. The novel silicon controlled rectifier comprises a substrate, wherein an N trap and a P trap are arranged on the substrate in the length direction of the substrate; a first P+ injection region and a first N+ injection region are sequentially arranged on the N trap in the width direction of the substrate; a second P+ injection region anda second N+ injection region are sequentially arranged on the P trap in the width direction of the substrate; the first P+ injection region and the second N+ injection region are correspondingly connected with an anode and a cathode, and the first N+ injection region and the second P+ injection region are connected through a metal line; the first P+ injection region, the first N+ injection region, the second P+ injection region and the second N+ injection region are all separated by first isolation grooves; the first P+ injection region and the first N+ injection region are separated from theedge of the N trap by second isolation grooves; and the second P+ injection region and the second N+ injection region are separated from the edge of the P trap by third isolation grooves. The novel silicon controlled rectifier saves the layout area and improves the area efficiency, and the voltage maintenance function of a silicon controlled rectifier structure is improved.

Description

technical field [0001] The invention belongs to the technical field of integrated circuits, and in particular relates to a novel thyristor, in particular to a high-area-efficiency thyristor which is used for electrostatic protection and has high sustain voltage. Background technique [0002] The phenomenon of Electro-Static discharge (ESD) in nature poses a serious threat to the reliability of integrated circuits. In the industry, 37% of the failures of integrated circuit products are caused by electrostatic discharge phenomena. And as the density of integrated circuits increases, on the one hand, due to the thinner and thinner silicon dioxide film (from micron to nanoscale), the electrostatic pressure on the device is getting lower and lower; on the other hand, it is easy to produce 1. Materials that accumulate static electricity are widely used, such as plastics, rubber, etc., which greatly increases the probability of integrated circuits being damaged by electrostatic di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02
Inventor 董树荣沈宏宇徐泽坤郭维
Owner ZHEJIANG UNIV KUNSHAN INNOVATION INST
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