Two translations and one rotation, large stroke, no coupling, large hollow parallel piezoelectric micro-motion platform

Abstract

The invention discloses a two-translation one-rotation large-stroke non-coupling large hollow parallel piezoelectric micro-motion platform, which includes a moving platform, a fixed platform body is arranged in the gap below the moving platform surface, a moving platform body is arranged in the gap inside the fixed platform body, the moving platform body and The first screw is fixed between the movable table; the movable table body includes the first edge, the second edge, the third edge and the fourth edge which are arranged vertically in the counterclockwise direction; The first drive unit on the edge, the second drive unit and the third drive unit that act telescopically on the second edge, the first sensor assembly facing the third edge, the second sensor assembly and the third sensor assembly facing the fourth edge; by Coordinated control of the voltage control of the first drive unit, the second drive unit and the third drive unit can realize two translational movements and one rotation of the movable platform. The invention has the advantages of simple and compact structure, large working surface, large stroke, no parasitic displacement, high natural frequency and convenient integration of capacitive displacement sensors.

Description

technical field [0001] The invention belongs to the field of nano-positioning technology, and relates to a micro-displacement mechanism in a nano-positioning system, in particular to a large hollow parallel piezoelectric micro-motion platform with two translations and one rotation with large stroke and no coupling. Background technique [0002] The piezoelectric micro-motion platform is a micro-displacement mechanism that transmits displacement and force by driving a flexible mechanism that can produce elastic deformation through a piezoelectric actuator. Because it has no hinges and bearings, it does not require assembly, there is no transmission gap, and no friction and wear; because it is driven by a piezoelectric actuator, its displacement resolution can reach nanometers, and its response time can reach milliseconds. Large, small size, strong carrying capacity. Therefore, it is widely used in technical fields that require micro / nano positioning, such as precision proces...

AI Technical Summary

Problems solved by technology

The superposition type is to firstly manufacture a single-degree-of-freedom piezoelectric micro-motion platform that can output micro-displacement along the x, y, and z directions, and then stack the three platforms in layers in the height direction. This kind of platform design is easy. There is no coupling in motion (that is, when the platform moves in a certain direction, there will be no parasitic displacement in the other direction), and the installation and pre-tightening of the piezoelectric actuator are convenient, but the volume is large, the structure is not compact, the natural frequency is low, and each direction of motion The performance parameters need to be designed separately

The serial type is to first make a moving platform (intermediate moving platform) that can produce movement in another direction on the moving platform (outer moving platform) that produces movement in one direction, and then make a moving platform that can produce movement in the last direction in the middle moving platform. The moving platform (inner moving platform) has a compact structure, and each moving platform has no coupling in motion, but the effective table is small, and the piezoelectric actuators used to drive the intermediate moving platform and the inner moving platform are installed and preloaded Difficult, the performance parameters of each direction of motion also need to be designed separately

The parallel type uses the same moving platform to realize the movement in all directions. It is convenient to install and pre-tighten the piezoelectric actuator. The performance parameters of each movement direction can be designed at the same time. The structure is complex and not compact, the worktable is small, the displacement stroke is small, there is displacement coupling, the natural frequency is low, and it is not easy to integrate displacement sensors

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