Microwave power sensor based on composite arched beam

Abstract

The present invention relates to a microwave power sensor based on a composite arched beam. The microwave power sensor comprises a substrate, a coplanar waveguide transmission line and a composite arched beam. The middle portion of the substrate is provided with the coplanar waveguide transmission line, the two sides of the substrate are provided with ground wires, and the composite arched beam isfixed on the ground wires through an anchor region and is located at the lower portion of the composite arched beam; the composite arched beam is formed by an elastic material at the middle portion and grapheme thin films coating the upper and lower portions, one sides of the upper layer of the grapheme thin film and the lower layer of the grapheme thin film are connected through the anchor region, the other sides of the upper layer of the grapheme thin film and the lower layer of the grapheme thin film are provide with two output ports, and the upper layer of the grapheme thin film and the lower layer of the grapheme thin film are respectively connected with output ports. The problem is overcome that a traditional beam structure cannot increase the beam length due to the limitation of the physical properties of the beam structure, the sensitivity of the sensor is greatly improved, and the precision of the microwave signal detection power and the stability of the system itself are improved according to the physical properties of the beam structure itself.

Description

technical field [0001] The invention belongs to the technical field of microwave power sensors, in particular to a microwave power sensor based on a composite arched beam. Background technique [0002] In the research of microwave signal generation, transmission and reception, etc., the measurement of microwave power is an indispensable basic testing technology. At present, the most common microwave power sensor is a surface-level fixed beam structure. When a microwave signal enters, an electrostatic force will be generated to bend the fixed beam, resulting in a change in capacitance and finally obtaining microwave power. Theoretically, the longer the length of the beam structure, the higher the sensitivity of the power sensor and the better the performance. However, due to the limitations of the physical properties of the traditional fixed beam itself, it cannot be processed very long, otherwise the structure will be unstable and easy to collapse. The bottleneck of the tr...

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Problems solved by technology

[0005] The purpose of the present invention is to address the above-mentioned status quo, aim at at least solving one of the problems in the prior art, and provide a microwave power sensor based on a composite arched beam, which overcomes the problem that the length of the beam cannot be increased due to the limitation of the traditional beam structure itself, and is not only extremely The sensitivity of the sensor is greatly improved, and due to the physical properties of the arched structure itself, it can also improve the accuracy of microwave signal detection power and the stability of the system itself

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