Soft magnetic alloy material and preparation method thereof
A technology of soft magnetic alloy and metal film, which is applied in the fields of magnetic materials, metal processing equipment, inductor/transformer/magnet manufacturing, etc., and can solve the problems of unreachable use conditions and low Q value
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preparation example Construction
[0025] The preparation method of the soft magnetic alloy material in this specific embodiment comprises the following steps:
[0026] S1. Prepare a soft magnetic alloy FeSiCr powder with a particle size of 8 μm to 15 μm. 0.2 wt% Al, 0.1-0.3 wt% P and 0.01-0.1 wt% B.
[0027] Preferably, the particle size of the soft magnetic alloy FeSiCr powder in S1 is 10 μm˜12 μm.
[0028] S2. Prepare soft magnetic alloy FeSiCr powder with a particle size of 1 μm to 3 μm. 0.2 wt% Al, 0.1-0.3 wt% P and 0.01-0.1 wt% B.
[0029] Preferably, the particle size of the soft magnetic alloy FeSiCr powder in S2 is 1.5 μm˜2.5 μm.
[0030] Powders with different particle sizes have different effects after different chemical or physical treatments. After experiments, the particle size range of the above soft magnetic alloy FeSiCr powder is conducive to improving the performance of the material in 1MHz high frequency application scenarios.
[0031] S3. By vapor deposition, a metal film of at least one...
experiment example 1
[0053] The soft magnetic alloy FeSiCr powder with a particle size of 8 μm is selected, and its composition is 92.1wt% Fe, 4.5wt% Si, 3.0wt% Cr, 0.05wt% Cu, 0.15wt% Al, 0.15wt% P and 0.05wt% B ;Select soft magnetic alloy FeSiCr powder with a particle size of 1μm, and its composition is 95.0wt% Fe, 3.58wt% Si, 1.2wt% Cr, 0.05wt% Cu, 0.05wt% Al, 0.1wt% P and 0.02wt% B; 8μm soft magnetic alloy FeSiCr powder is formed on the surface of the particles by vapor deposition to form a composite metal film of Fe, Zn and Al with a thickness of 200 nm; the powder after vapor deposition is in an atmosphere with a volume ratio of oxygen: nitrogen = 3:7 Heat treatment at 750°C for 1.5 hours, and pass through a 500# sieve to obtain pretreated soft magnetic alloy powder; Mix to obtain mixed soft magnetic alloy powder; place the obtained mixed soft magnetic alloy powder in a potassium metaphosphate solution at 50° C. (the potassium metaphosphate solution accounts for 3wt% of the mass of the mixed...
experiment example 2
[0055] A soft magnetic alloy FeSiCr powder with a particle size of 12 μm was selected, and its composition was 93.5wt% Fe, 3.5wt% Si, 2.5wt% Cr, 0.05wt% Cu, 0.05wt% Al, 0.3wt% P and 0.1wt% B ;Select the soft magnetic alloy FeSiCr powder with a particle size of 2μm, and its composition is 94.0wt% Fe, 4.5wt% Si, 1.2wt% Cr, 0.01wt% Cu, 0.1wt% Al, 0.15wt% P and 0.04wt% B; 12μm soft magnetic alloy FeSiCr powder was deposited on the particle surface by vapor deposition to form a composite metal film of Fe, Al and Cr with a thickness of 80 nm; the powder after vapor deposition was in an atmosphere with a volume ratio of oxygen: nitrogen = 3: 7 Perform heat treatment, that is, heat treatment at 600 °C for 2 hours, mix the pretreated soft magnetic alloy powder with the 2 μm soft magnetic alloy powder according to the mass ratio of 2.5:7.5 to prepare the mixed soft magnetic alloy powder; Mix the soft magnetic alloy powder in Sodium metaphosphate solution at 50°C (sodium metaphosphate so...
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