Monolithic integration type MEMS gas sensor
A gas sensor and monolithic integration technology, applied in the direction of semiconductor/solid-state device parts, instruments, scientific instruments, etc., can solve the problems of narrow sensing range, increased use cost, waste, etc., and achieve the effect of reducing production cost and use cost
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[0014] The principles and features of the present invention will be described below with reference to the accompanying drawings. The examples cited are only used to explain the present invention, and are not used to limit the scope of the present invention.
[0015] A monolithic integrated MEMS gas sensor, comprising a substrate 1, a silicon carbide layer 2 located on the substrate 1, the upper surface of the silicon carbide layer 2 is coated with a silicon dioxide film 3, the silicon dioxide film 3 An insulating layer 4 is provided on the surface, a gas sensitive layer 5 is provided on the upper surface of the insulating layer 4, a heating electrode 6 is provided between the gas sensitive layer 5 and the insulating layer 4, and the gas sensitive layer 5 is two Above, a heat sensitive layer 7 is provided between the gas sensitive layer 5 and the heating electrode 6, the substrate 1, the silicon carbide layer 2, the silicon dioxide film 3, the insulating layer 4, the heating electr...
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