Terahertz metamaterial waver absorber with proactively tunable frequency and manufacturing method thereof
A terahertz and metamaterial technology, applied in the direction of instruments, optics, electrical components, etc., can solve the problems that cannot meet the requirements of active tuning, achieve the effects of promoting development and application, fully absorbing waves, and overcoming limitations
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Embodiment 1
[0044] see figure 1 , figure 2 as well as image 3 , this embodiment provides an actively frequency-tunable terahertz metamaterial absorber, which includes a bottom structure 1 , a middle dielectric layer 2 and a top resonant structure 3 . The wave absorber of this embodiment is used in one or more of stealth devices, terahertz imaging devices, micro-antennas, electromagnetic wave detection and control devices, and solar cells, and can also be used in other various devices that need to be tuned or device.
[0045] The underlying structure 1 includes at least one layer of metal film, and the metal film is a continuous film. The metal film has a conductivity of 5.8×10 7S / m copper is made, and its thickness can be greater than the skin depth of electromagnetic waves in the metal. In this embodiment, the thickness hm of the underlying structure 1 is 0.3 um and is rectangular. The underlying structure 1 can be formed by stacking multiple layers of metal films, and its length...
Embodiment 2
[0058] This embodiment provides a frequency-tunable terahertz metamaterial absorber, which adds a temperature control unit on the basis of Embodiment 1. The temperature control unit is used to adjust the temperature of the top resonant structure 3 , which can heat up and cool down the top resonant structure 3 . In this way, when it is necessary to adjust the absorbing frequency band of the absorber in practical applications, the temperature of the top resonant structure 3 can be adjusted through the temperature control unit, so that the SrTiO 3 The ambient temperature of the material changes, thereby changing the absorbing frequency band of the absorber. Therefore, when other devices or devices are equipped with the absorber of this embodiment, the device or device only needs to control the temperature control unit to realize the automatic adjustment of the absorber's absorbing frequency band, which is convenient and quick.
Embodiment 3
[0060] This embodiment provides a method for manufacturing a terahertz metamaterial absorber whose frequency can be actively tuned, which is used to manufacture the frequency actively tunable terahertz metamaterial absorber in embodiment 1 or embodiment 2. The method includes the following steps:
[0061] 1. According to the shape of the underlying structure 1, excavate a positioning groove on the base material whose depth is not less than the sum of the thicknesses of the underlying structure 1, the intermediate dielectric layer 2 and the top resonant structure 3;
[0062] 2. Starting from the bottom of the positioning groove, at least one layer of metal film is coated, and after the metal film is shaped, a liquid flexible PDMS material is poured into the positioning groove to form an intermediate dielectric layer 2;
[0063] 3. Set up a corresponding resonant cavity 4 in each metal resonant structure 5, and place the SrTiO 3 The material fills the resonant cavity 4;
[006...
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