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Touch/slip sensor and preparation method thereof, electronic equipment, braille identification equipment and robot

A sensor and tactile technology, applied in the field of sensing, can solve the problems of not having slippery perception, and achieve the effect of improving sensitivity and measuring range, and improving integration and stability

Active Publication Date: 2019-07-19
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, most tactile sensors can only detect positive contact force and do not have the function of sliding sensation

Method used

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  • Touch/slip sensor and preparation method thereof, electronic equipment, braille identification equipment and robot
  • Touch/slip sensor and preparation method thereof, electronic equipment, braille identification equipment and robot
  • Touch/slip sensor and preparation method thereof, electronic equipment, braille identification equipment and robot

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] see figure 1 , is a schematic structural diagram of an embodiment of a capacitive touch / slip sensor of the present invention. Specifically, the capacitive touch / slip sensor of this embodiment includes from top to bottom:

[0043] The first flexible substrate 1, the first electrode layer 2 with a micro-nano structure, the dielectric layer 3, the second electrode layer 4 and the second flexible substrate 5, wherein the first electrode layer 1 and the second electrode layer 3 are opposite set, and the dielectric layer 3 between the first electrode layer and the second electrode layer conformally integrates with the micro-nano structure of the first electrode layer 2 to form an electrode / dielectric layer integrated structure.

[0044] In this embodiment, the dielectric layer 3 is a composite dielectric layer formed by combining the flexible isolation layer 31 and the piezoelectric layer 32. Specifically, the flexible isolation layer 31 is made of flexible insulating materia...

Embodiment 2

[0049] The present invention also provides another capacitive touch / slip sensor, which includes the various components in the first embodiment above, the difference is that the micro-nano structure on the first electrode layer in this embodiment is the first electrode The lower surface (that is, the surface in contact with the dielectric layer) periodically extends downwards, so that the first electrode layer 2 is approximately saw-toothed, see Figure 4 .

Embodiment 3

[0051] The present invention also provides another capacitive touch / slip sensor, which includes the various components in the first embodiment above, the difference is that in this embodiment, both the first electrode layer 2 and the second electrode layer 4 are A micro-nano structure is provided, and the protruding parts of the micro-nano structure on the first electrode layer 2 and the micro-nano structure on the second electrode layer are alternately arranged as Figure 5a As shown, or the raised part is set relative to, such as Figure 5b .

[0052] Of course, in this embodiment, both the first electrode layer and the second electrode layer can use graphene walls, and the preparation methods of the two are the same, that is, a wet etching process is used to etch a micron amount on the surface of the silicon substrate. level of multiple grooves; then use the PECVD method to generate graphene on the silicon substrate, and the growth time of graphene is controlled at 45-60 m...

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Abstract

The invention discloses a capacitive touch / slip sensor. The capacitive touch / slip sensor comprises two electrode layers arranged oppositely, and a dielectric layer located between the two electrode layers; a micro-nano structure is arranged on at least one electrode layer corresponding to one side of the dielectric layer, and the dielectric layer and the electrode layer with the micro-nano structure are conformally integrated to form a dielectric layer / electrode conformal integrated structure, so that the integration level and the stability during the period are improved; and a graphene nanowall with the micro-nano structure is adopted on the electrode layer, so that the sensitivity and the measuring range of the sensor are improved. Correspondingly, the invention further provides a preparation method of the capacitive touch / slip sensor, electronic equipment with the capacitive touch / slip sensor, braille identification equipment and a robot.

Description

technical field [0001] The invention relates to sensing technology, and relates to a graphene nano-wall-based capacitive touch / slip sensor and a preparation method thereof, as well as electronic equipment, braille recognition equipment and robots with the capacitive touch / slip sensor. Background technique [0002] There are a series of sensory units distributed on the human skin, which can sense the temperature of the outside world, the complex shape and texture of the outside world, and also sense different degrees of pressure. This is because the skin is widely distributed with tactile receptors and complex internal neural structures. And these sensory receptors convert the perceived external information into neural current signals and transmit them to the brain, and then the complex nervous system analyzes the information of the contact object. With the continuous development of robot technology, people also want robots to have electronic skin with the same function as hu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/16G09B21/00B82Y30/00
CPCB82Y30/00G01L1/16G09B21/004
Inventor 杨俊周熙魏大鹏史浩飞
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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