A kind of device and oblique scanning method based on digital micromirror ldi

Abstract

The invention discloses a device based on a digital micromirror LDI and inclined scanning method, wherein inclined scanning is completed through two groups of imaging lenses and an inclined mask. Theinvention comprises a DMD digital micromirror, wherein a total internal reflection TIR prism is arranged between the DMD digital micromirror and the first group of imaging lenses, one end of the firstgroup of imaging lenses, which is far away from the DMD digital micromirror, is provided with an inclined mask, one end of the inclined mask, which is far away from the first group of imaging lenses,is provided with the second group of imaging lenses, and one end of the second group of imaging lenses, which is far away from the inclined mask, is provided with a target surface. The invention realizes the inclined scanning function, simplifies the data processing difficulty during exposure pattern rasterization and compensates the precision error caused on the developing process. According tothe invention, each row of pixels generates a certain displacement, and finally, the arrangement like a parallelogram appears on the target surface, so that the data processing difficulty during exposure pattern rasterization is simplified.

Description

technical field [0001] The invention relates to the field of PCB without film exposure, in particular to a digital micromirror LDI-based device and an oblique scanning method, in particular to a method for completing oblique scanning through two sets of imaging lenses and an oblique mask. Background technique [0002] The traditional exposure machine is one of the most important equipment in the current printed circuit board (PCB) manufacturing process, and its exposure quality determines the yield rate and line width accuracy of the PCB. As the requirements for PCB line width and line spacing become narrower and narrower, the demand for film-free exposure technology becomes more urgent, and LDI laser direct imaging technology develops rapidly; currently, digital micromirror imaging solutions are mainly used in the market. However, the DMD digital micromirror itself is in the shape of grid pixels, and the simple direct scan method is difficult to cover the accuracy requireme...

AI Technical Summary

Problems solved by technology

However, the DMD digital micromirror itself is in the shape of grid pixels, and the simple direct scan method is difficult to cover the precision requirements of the PCB

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