Short-range scanning-based spectral confocal ranging method, device and equipment

A technology of spectral confocal and ranging method, which is applied in the field of spectral confocal displacement measurement, can solve problems such as measurement errors, and achieve the effects of reducing costs, improving accuracy and adaptability

Active Publication Date: 2019-07-26
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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Problems solved by technology

However, since the surface to be tested used in the calibration process is not exactly the same as the surface to be tested in the real measurement, a cert

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  • Short-range scanning-based spectral confocal ranging method, device and equipment
  • Short-range scanning-based spectral confocal ranging method, device and equipment
  • Short-range scanning-based spectral confocal ranging method, device and equipment

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Embodiment 1

[0039] In order to solve the calibration process of the search relationship curve between the axial distance and the spectrometer pixel number, the surface to be measured is not exactly the same as the surface to be measured in the real measurement, which leads to certain errors in the actual measurement, such as figure 1 As shown, the present invention provides a kind of spectral confocal ranging method based on short-range scanning, comprising:

[0040] S1, establish the relationship curve between the axial distance of the probe and the pixel number of the spectrometer;

[0041] In this step 1, any measurable object can be used to calibrate the relationship curve without providing a sample of the measured object. Specifically, the step S1 includes sub-steps:

[0042] S11, fix the surface of any measurable object on the positioning scanning mechanism, scan within the axial measurement range of the probe, record the axial distance and reflected spectral signal of each scanning...

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Abstract

The invention discloses a short-range scanning-based spectral confocal ranging method, device and equipment. The method comprises the following steps: establishing a relation curve between the axial distance of a measuring head and the pixel serial number of a spectrometer; the measuring head scanning the current position in a short measuring range to obtain an actually measured reference light intensity signal; and obtaining a pixel sequence number value according to a noise spectrum signal, a reflection spectrum signal and the actually measured reference light intensity signal, and substituting the pixel sequence number value into the search relation curve to obtain the axial distance of the current position of the surface of the object to be measured. According to the invention, the current position is scanned by using the measuring head in a short measuring range, the maximum reference light intensity signal is obtained in real time, the maximum reference light intensity signal inthe calibration process is not required to be stored in advance, and the measurement precision is improved. In addition, full-range scanning is not needed, only short-range scanning covering the current position is needed, no positioning requirement is required for a scanning device, and the cost of the instrument is reduced.

Description

technical field [0001] The invention relates to the technical field of spectral confocal displacement measurement, in particular to a method, device and equipment for spectral confocal distance measurement based on short-range scanning. Background technique [0002] Spectral confocal displacement detection technology uses optical dispersion to focus light of different wavelengths on different optical axis positions, forming a one-to-one correspondence between wavelengths and axial distances. Through the design of the confocal optical path, the spectral peak wavelength reflected from the surface to be tested and passed through the conjugate hole is obtained, and the axial distance of the surface to be tested can be calculated. [0003] At present, all spectral confocal displacement sensors need to be calibrated with high precision before the instrument leaves the factory, and the search relationship curve between the axial distance and the focusing wavelength is stored in the...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 白蛟李星辉王晓浩周倩倪凯
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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