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Preparation process of a ceramic thick film pressure sensor

A pressure sensor and preparation process technology, which is applied in the direction of fluid pressure measurement by changing ohmic resistance, can solve the problems of large nonlinear error, low gage factor, poor stability, etc., achieves small nonlinear error, improved gage factor, high The effect of stability

Active Publication Date: 2020-12-18
SHAOXING UNIV YUANPEI COLLEGE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The first purpose of the present invention is to propose a ceramic thick film pressure sensor preparation process in order to overcome the problems of large nonlinear error, poor repeatability, and large hysteresis of the current ceramic thick film pressure sensor
[0005] The second purpose of the present invention is to propose a preparation method of thick film resistor paste in order to overcome the problems of large resistance value, low gauge factor and poor stability of current thick film resistor paste

Method used

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  • Preparation process of a ceramic thick film pressure sensor
  • Preparation process of a ceramic thick film pressure sensor
  • Preparation process of a ceramic thick film pressure sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Embodiment 1: A preparation process of a ceramic thick film pressure sensor, comprising the following preparation steps:

[0035] (1) Clean the ceramic base and dry it for later use;

[0036] (2) Stir the silver-palladium conductor paste and let it stand, then apply the silver-palladium conductor paste to the screen, and use a scraper to print it evenly on the ceramic base. The moving speed of the scraper is 3cm / s during printing. The angle between the scraper and the screen is 40°, and the distance between the screen and the ceramic base is 1 mm. Then, place the ceramic base printed with silver-palladium conductor paste on a horizontal surface, level it for 10 minutes, and bake it at 170°C for 10 minutes;

[0037] (3) Place the ceramic base printed with silver-palladium conductor paste after drying in a muffle furnace for sintering to obtain a conductor electrode. The sintering temperature conditions are as follows: heating up to 800°C at a heating rate of 5°C / min, Ke...

Embodiment 2

[0039] Embodiment 2: A preparation process of a ceramic thick film pressure sensor, comprising the following preparation steps:

[0040] (1) Clean the ceramic base and dry it for later use;

[0041] (2) Stir the silver-palladium conductor paste and let it stand, then apply the silver-palladium conductor paste to the screen, and use a scraper to evenly print on the ceramic base. The moving speed of the scraper during printing is 5cm / s. The angle between the scraper and the screen is 70°, and the distance between the screen and the ceramic base is 4mm. Then, place the ceramic base printed with silver-palladium conductor paste on a horizontal surface, level it for 20 minutes, and bake it at 140°C for 20 minutes;

[0042] (3) The dried ceramic base printed with silver-palladium conductor paste is placed in a muffle furnace for sintering to obtain a conductor electrode. The sintering temperature conditions are as follows: heating up to 900°C at a heating rate of 10°C / min, Keep it ...

Embodiment 3

[0044] Embodiment 3: A preparation process of a ceramic thick film pressure sensor, comprising the following preparation steps:

[0045] (1) Clean the ceramic base and dry it for later use;

[0046] (2) Stir the silver-palladium conductor paste and let it stand, then apply the silver-palladium conductor paste to the screen, and use a scraper to evenly print it on the ceramic base. The moving speed of the scraper is 4cm / s during printing. The angle between the scraper and the screen is 50°, and the distance between the screen and the ceramic base is 3 mm. Then place the ceramic base printed with silver-palladium conductor paste on a horizontal surface, level it for 15 minutes, and bake it at 155°C for 15 minutes;

[0047] (3) Place the dried ceramic base printed with silver-palladium conductor paste in a muffle furnace for sintering to obtain a conductor electrode. The sintering temperature conditions are as follows: heating up to 850°C at a heating rate of 7°C / min, Keep it fo...

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Abstract

The invention relates to the field of pressure sensors, and provides a preparation process of a ceramic thick film pressure sensor. The preparation process comprises the following steps of step (1), cleaning; step (2), applying a silver palladium conductor slurry on a wire mesh, uniformly printing the silver palladium conductor slurry on a ceramic base by using a scraper, and leveling and drying;step (3), placing the ceramic base in a muffle furnace for sintering to obtain a conductor electrode; step (4), printing a thick film resistor slurry on the conductor electrode and leveling and drying; and step (5), placing the dried conductor electrode printed with the thick film resistor slurry in the muffle furnace for sintering to obtain a ceramic piezoresistive pressure sensor. The ceramic thick film pressure sensor prepared by the invention is small in nonlinear error, good in repeatability and small in hysteresis.

Description

technical field [0001] The invention relates to the field of pressure sensors, in particular to a preparation process of a ceramic thick film pressure sensor. Background technique [0002] The core body of ceramic thick film pressure sensor adopts thick film technology, and the core body of ceramic thick film pressure sensor adopts thick film technology. The pressure detection is realized by printing the strain bridge resistance and temperature and zero adjustment circuit on the surface of ceramic elastic substrate. . Its basic structure is: four thick-film strain resistors are fabricated on ceramic elastomer by thick-film technology, and the thick-film strain resistors are interconnected with conduction bands printed and burned with thick-film conductor paste to form a Wheatstone bridge. The pressure directly acts on the front surface of the ceramic diaphragm to cause a slight deformation of the diaphragm. The change of external pressure is converted into the change of res...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/06
CPCG01L9/06
Inventor 徐志望
Owner SHAOXING UNIV YUANPEI COLLEGE