High-temperature tube furnace suitable for in-situ optical microscopic observation and spectrum analysis
A high-temperature tube furnace and optical microscopy technology, which is applied in the direction of material analysis, material analysis, color/spectral characteristic measurement, etc. through optical means, and can solve problems such as uncoupling, furnace wires cannot work for a long time, furnace wires are blown, etc.
Pending Publication Date: 2019-07-30
TIANJIN UNIVERSITY OF TECHNOLOGY
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Problems solved by technology
[0004] However, both commercialized and patented high-temperature micro-heating stages have the following disadvantages: the heating furnace wire in the equipment and the sample are in the same sintering environment, and the furnace wire exposed to high temperature is easy to fuse due to sample contamination. Silk is unable to work for a long time in a corrosive atmosphere
Conventional high-temperature tube furnaces use sealed quartz tubes to isolate the heating furnace filaments and samples. The quartz tubes can effectively protect the heating furnace filaments, block the damage of the sintering gas to the furnace filaments, and have a larger heating temperature zone. However, conventional high-temperature tubes The traditional furnace has the disadvantages of large volume, low heating efficiency, slow heating rate, no optical observation window, and inability to couple with microscopic imaging and spectral testing systems
Method used
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Embodiment 1
[0045] refer to figure 1 The composition of the high-temperature tube furnace suitable for in-situ optical microscopic observation and spectral measurement according to the present invention is shown, including a furnace body (1), a vacuum atmosphere system (2), a cooling liquid circulation system (3) and a temperature control power supply system(4);
[0046] The composition of described furnace body (1) part is as figure 2 , 3 As shown, including insulating shell (1-1), cooling chamber (1-2), insulation layer (1-3), furnace chamber (1-4), furnace tube (1-5), crucible base (1-6) and an insulating base plate (1-7);
[0047] The cooling chamber (1-2) is a hollow rectangular cavity, the bottom of which is fixed on the insulating base plate (1-7), the outer part is covered with an insulating shell (1-1), and the inner part is an insulating layer (1-3); The middle part of the insulation layer (1-3) is the furnace (1-5); the furnace tube (1-5) passes through the middle part of ...
Embodiment 2
[0064] Implementation example 2 (deposition crystal state change of molybdenum trioxide at different temperatures)
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Abstract
The invention is a high-temperature tube furnace suitable for in-situ optical microscopic observation and spectrum analysis. The device comprises a furnace body, a vacuum atmosphere system, a coolingliquid circulating system and a temperature-controlling power system; the furnace body comprises an insulation shell, a cooling bin, a thermal insulation layer, a hearth, a furnace tube, a crucible base and an insulating base plate; the furnace tube is connected with the vacuum atmosphere system; the water cooling bin is connected with the cooling liquid circulating system; and the temperature-controlling power system is connected with heating furnace wires and thermocouple of the hearth. The high-temperature tube furnace disclosed by the invention can be coupled with an optical microscopic observation system and a spectrum measurement analysis system to realize real-time and in-situ morphology observation and spectrum measurement on the sample material sintering process.
Description
technical field [0001] The invention discloses a high-temperature tube furnace, which can provide a stable sintering environment up to 1100°C, and can be coupled with optical microscopic imaging systems, spectral analysis and other systems to realize real-time and original sintering process of samples. The invention relates to in-situ observation and measurement, which belongs to the field of real-time in-situ measurement equipment for material synthesis, crystal growth, morphology and spectrum. Background technique [0002] High-temperature sintering is one of the important links in technical processes such as crystal growth, material synthesis, metal heat treatment, and surface coating. Real-time and in-situ acquisition of information on the morphology, structure, and phase transition of samples during high-temperature sintering is very important for scientific research and Industrial production is of great significance. The micro-optical imaging system is the main means ...
Claims
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Patent Timeline
Login to View More IPC IPC(8): G01N21/01G01N21/31G01N21/84
CPCG01N21/01G01N21/31G01N21/84G01N2021/0112G01N2021/8411
Inventor 王迪吴国政薛豪
Owner TIANJIN UNIVERSITY OF TECHNOLOGY