Zero position correction-based MEMS accelerometer

A zero-position correction, accelerometer technology, applied in the measurement of acceleration, velocity/acceleration/shock measurement, acceleration measurement using inertial force, etc., can solve the problems affecting the mass production of MEMS accelerometer, device stability, temperature characteristics, The problem of different zero output changes, to achieve the effect of compact overall structure design, good overall linearity, and small chip size

Pending Publication Date: 2019-08-06
四川知微传感技术有限公司
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Problems solved by technology

However, due to structural processing errors in the production process of MEMS accelerometers, installation errors and changes in ambient temperature during use, the zero output of the device will vary, which not only affects the mass production of MEMS accelerometers, but also It has a great impact on the stability and temperature characteristics of the device, and the overall accuracy is not high, which will seriously hinder its application in the high-precision field

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  • Zero position correction-based MEMS accelerometer
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  • Zero position correction-based MEMS accelerometer

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[0033] In order to understand the above-mentioned purpose, features and advantages of the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, under the condition of not conflicting with each other, the embodiments of the present application and the features in the embodiments can be combined with each other.

[0034] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from the scope of this description. Therefore, the protection scope of the present invention is not limited by the following disclosure. limitations of specific examples.

[0035] like figure 1 As shown, the MEMS accelerometer based on zero correction according to the embodiment of the present invention includes a substrate 1, and ...

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Abstract

The invention discloses a zero position correction-based MEMS accelerometer. The zero position correction-based MEMS accelerometer comprises a substrate; an oxide layer is arranged on the substrate; aplurality of anchor points are fixed on the substrate through an oxide layer; a sensitive device layer is arranged on the oxide layer; the sensitive device layer comprises a differential capacitancedetection structure, an accelerometer closed-loop feedback electrode structure, a plurality of cantilever beams, a zero position correction structure, a sensitive mass block, two stopping structures and two fixing structures; the structure of the accelerometer is properly designed, so that the problem of the inconsistency of the change of the zero position output of the structure of the accelerometer caused by machining error, installation error, environment temperature and the like can be solved, and the influence of zero position change on performance such as device stability, temperature characteristics and the like is eliminated.

Description

technical field [0001] The invention relates to the field of micromechanical MEMS accelerometers, in particular to a zero-position correction-based MEMS accelerometer. Background technique [0002] Micromechanical MEMS accelerometer is a device or device for measuring acceleration, which has a wide range of application requirements in high-precision fields such as industrial control, aviation, aerospace, and military. However, due to structural processing errors in the production process of MEMS accelerometers, installation errors and changes in ambient temperature during use, the zero output of the device will vary, which not only affects the mass production of MEMS accelerometers, but also It has a great impact on the stability and temperature characteristics of the device, and the overall accuracy is not high, which will seriously hinder its application in the high-precision field. Therefore, it is necessary to adopt an improved strategy to correct the zero output of the...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/08G01P15/125G01P15/13
CPCG01P15/08G01P15/125G01P15/13G01P2015/0868
Inventor 雷龙海周骏王龙峰王志山永启
Owner 四川知微传感技术有限公司
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