Crucible taking and placing device

Abstract

The invention provides a crucible taking and placing device, which comprises a taking and placing unit, a transfer unit and a control unit, wherein the taking and placing unit includes a magnetic diskbody and a handle arranged on the magnetic disk body, and the magnetic disk body is internally provided with electromagnets; the transfer unit includes a transfer cover body and a fastener, and the transfer cover body is provided with a magnet; and the control unit includes an electromagnet switch and used for controlling the opening and closing of the electromagnets. The crucible taking and placing device provided by the invention takes and places crucibles with different apertures by adopting a novel magnetic attraction mode, and the cover body of the corresponding crucible rather than a nozzle of the crucible is magnetically attracted, thereby avoiding a problem that the corresponding taking and placing device needs to be replaced due to different apertures of the taken and placed crucibles in the prior art.

Description

Technical field [0001] The present invention relates to the technical field of display panel equipment, in particular, a crucible picking and placing device for picking and placing crucibles used in vapor deposition process equipment. Background technique [0002] It is known that the evaporation process in the display panel is the vacuum thermal evaporation process, which is a process of heating under vacuum conditions to evaporate or sublime the material into gaseous particles, and deposit a film on the substrate. [0003] The evaporation process technology is widely used in the preparation of organic light emitting diodes (OLED), organic photovoltaic cells (OPV), electrochromic devices (ECD) and other products. In the device preparation process, the organic film layer or some metal layers are generally produced by an evaporation process. [0004] Specifically, when preparing different functional layers of the device or preparing different products, different evaporation materials...

AI Technical Summary

Problems solved by technology

In the actual use process, there will be multiple evaporation sources in one evaporation chamber, and then the crucibles with nozzles of different diameters will be used correspondingly. Therefore, when picking and placing different crucibles, it is necessary to replace the corresponding fixture repeatedly. operation, which will obviously reduce work efficiency

[0006] Furthermore, the prolongation of the time for picking and placing the crucible will correspondingly increase the opening time of the evaporation machine, which will easily cause contamination of the evaporation chamber

And if there is water-absorbing material in the chamber, it will easily cause the residual material on the chamber wall to absorb water, which will affect the vacuum environment of the evaporation chamber in the future.

Moreover, the prolongation of the time for taking and placing the crucible also increases the residence time of the operator in the evaporation chamber, and the residual organic gas or material powder in the chamber has potential safety hazards affecting human health.

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