A crucible pick-and-place device

Abstract

The invention provides a crucible pick-and-place device, which includes a pick-and-place unit, an adapter unit and a control unit. Wherein the pick-and-place unit includes a disk body and a handle arranged on the disk body, wherein an electromagnet is arranged in the disk body. The adapter unit includes an adapter cover and a buckle, wherein the adapter cover is provided with a magnet. The control unit includes an electromagnet switch for controlling the opening and closing of the electromagnet. The invention provides a crucible pick-and-place device, which adopts an innovative magnetic adsorption method to pick and place crucibles with different calibers, because the object for magnetic adsorption is the cover of the corresponding crucible instead of the nozzle of the crucible, thereby avoiding In the prior art, there is a problem that the corresponding pick-and-place device needs to be replaced due to the different nozzle diameters of the pick-and-place crucible.

Description

technical field [0001] The present invention relates to the technical field of display panel equipment, in particular, a crucible pick-and-place device for picking and placing crucibles used in evaporation process equipment. Background technique [0002] It is known that the evaporation process in the display panel is the vacuum thermal evaporation process, which is a process in which materials are evaporated or sublimated into gaseous particles by heating under vacuum conditions, and a film is deposited on the substrate. [0003] The vapor deposition process technology is widely used in the preparation of organic light emitting diodes (OLEDs), organic photovoltaic cells (OPVs), electrochromic devices (ECDs), and other products. In the device preparation process, the evaporation process is generally used to make organic film layers or some metal layers. [0004] Specifically, when preparing different functional layers of the device or preparing different products, different...

AI Technical Summary

Problems solved by technology

In the actual use process, there will be multiple evaporation sources in one evaporation chamber, and then the crucibles with nozzles of different diameters will be used correspondingly. Therefore, when picking and placing different crucibles, it is necessary to replace the corresponding fixture repeatedly. operation, which will obviously reduce work efficiency

[0006] Furthermore, the prolongation of the time for picking and placing the crucible will correspondingly increase the opening time of the evaporation machine, which will easily cause contamination of the evaporation chamber

And if there is water-absorbing material in the chamber, it will easily cause the residual material on the chamber wall to absorb water, which will affect the vacuum environment of the evaporation chamber in the future.

Moreover, the prolongation of the time for taking and placing the crucible also increases the residence time of the operator in the evaporation chamber, and the residual organic gas or material powder in the chamber has potential safety hazards affecting human health.

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