Micro-nano microwave power sensor based on suspension low-dimensional thermoelectric material and measuring method of micro-nano microwave power sensor

Abstract

The invention discloses a micro-nano microwave power sensor based on a suspension low-dimensional thermoelectric material and a measuring method of the micro-nano microwave power sensor. An independent one-dimensional or two-dimensional high-quality thermoelectric material nano structure crosses two suspending temperature sensing substrates, and a microwave power-thermal-electricity conversion integrated system is established. When to-be-measured power is transmitted into one of the suspension substrates and the temperature of the suspension substrate is increased, the temperature difference is generated at the two ends of the thermoelectric material nano structure, the temperature difference forms thermoelectric potential, a thermal-electric conversion coefficient of the single thermoelectric material is the calibrated material intrinsic property, and thus the system can calculate the microwave power of the input end by measuring the thermoelectric potential. Temperature compensationcorrection does not need to be conducted on a reference end of the micro-nano microwave power sensor, the temperature of the reference end is measured by the system in real time, and the measuring error and the influence of the environment are lowered substantially; and a seebeck coefficient of the material can be increased through the low-dimensional structure, the thermal loss can be greatly lowered through the suspension substrates, and thus power testing precision can be effectively improved through the micro-nano microwave power sensor.

Description

technical field [0001] The invention relates to a miniaturized integrated microwave power meter, in particular to a high-precision microwave power measurement device and a measurement method based on suspended low-dimensional nanometer thermoelectric materials. Background technique [0002] The power output of a system is a key indicator of system performance. For microwave systems, microwave power is an important parameter to characterize the characteristics of microwave signals, and can be widely used in microwave communication, radar, navigation and other fields, so the measurement of microwave power is very important. According to the type of power sensor technology, the existing power meters can be divided into three categories: thermistor type power meters, thermocouple type power meters and crystal detector type power meters. Thermistor-type power meters use a thermistor as the power sensing element. The temperature coefficient of the thermistor value is large, and ...

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Problems solved by technology

The temperature coefficient of the thermistor value is large, and the power of the measured signal is absorbed by the thermistor to generate heat, which makes its own temperature rise, and the resistance value changes significantly. Use the resistance bridge to measure the change of the resistance value and display the power value , but its temperature characteristics hinder the improvement of power measurement sensitivity and are susceptible to ambient temperature changes

The thermocouple power meter uses the thermocouple junction in the thermocouple power meter to directly absorb the high-frequency signal power, and the junction temperature rises to generate a thermoelectric potential. The magnitude of the potential is proportional to the absorbed high-frequency power value. The disadvantages are Strict requirements on environment and test equipment, and long test time

The crystal detector power meter uses a crystal diode detector to convert the high-frequency signal into a low-frequency or DC signal, and properly selects the operating point so that the amplitude of the detector output signal is proportional to the power of the high-frequency signal, but its accuracy is not high and requires additional power source for compensation

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