Micro-nano microwave power sensor based on suspension low-dimensional thermoelectric material and measuring method of micro-nano microwave power sensor

A thermoelectric material, microwave power technology, applied in the direction of electric power measurement by thermal method, etc., can solve problems such as being susceptible to environmental temperature changes, harsh environment and test equipment requirements, and significant changes in resistance value, and achieves the improvement of Seebeck. coefficient, improve linearity and accuracy, reduce the effect of heat loss
CN110108930AInactive Publication Date: 2019-08-09PKU HKUST SHENZHEN HONGKONG INSTITUTION
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
PKU HKUST SHENZHEN HONGKONG INSTITUTION
Publication Date
2019-08-09
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a micro-nano microwave power sensor based on a suspension low-dimensional thermoelectric material and a measuring method of the micro-nano microwave power sensor. An independent one-dimensional or two-dimensional high-quality thermoelectric material nano structure crosses two suspending temperature sensing substrates, and a microwave power-thermal-electricity conversion integrated system is established. When to-be-measured power is transmitted into one of the suspension substrates and the temperature of the suspension substrate is increased, the temperature difference is generated at the two ends of the thermoelectric material nano structure, the temperature difference forms thermoelectric potential, a thermal-electric conversion coefficient of the single thermoelectric material is the calibrated material intrinsic property, and thus the system can calculate the microwave power of the input end by measuring the thermoelectric potential. Temperature compensationcorrection does not need to be conducted on a reference end of the micro-nano microwave power sensor, the temperature of the reference end is measured by the system in real time, and the measuring error and the influence of the environment are lowered substantially; and a seebeck coefficient of the material can be increased through the low-dimensional structure, the thermal loss can be greatly lowered through the suspension substrates, and thus power testing precision can be effectively improved through the micro-nano microwave power sensor.
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Description

technical field

[0001] The invention relates to a miniaturized integrated microwave power meter, in particular to a high-precision microwave power measurement device and a measurement method based on suspended low-dimensional nanometer thermoelectric materials. Background technique

[0002] The power output of a system is a key indicator of system performance. For microwave systems, microwave power is an important parameter to characterize the characteristics of microwave signals, and can be widely used in microwave communication, radar, navigation and other fields, so the measurement of microwave power is very important. According to the type of power sensor technology, the existing power meters can be divided into three categories: thermistor type power meters, thermocouple type power meters and crystal detector type power meters. Thermistor-type power meters use a thermistor as the power sensing element. The temperature coefficient of the thermistor value is large, and ...

Claims

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