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High-temperature stable electrode and preparation method thereof

A high-temperature stability, electrode technology, applied to electrical components, impedance networks, etc., can solve problems such as poor electrode stability, achieve good conductivity, reduce resistivity, and improve stability

Inactive Publication Date: 2019-08-09
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] In view of the above existing problems or deficiencies, in order to solve the problem of poor stability of existing electrodes at high temperatures, the present invention provides a high temperature stable electrode and its preparation method

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  • High-temperature stable electrode and preparation method thereof

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Embodiment Construction

[0020] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0021] The substrate used in the embodiment is an LGS piezoelectric material substrate, and the purity of the target used is 99.99%. Before the substrate is put into the chamber, the substrate is cleaned to obtain a clean substrate surface. Firstly, the substrate is placed in acetone and absolute ethanol solutions for ultrasonic cleaning for 5 minutes each to remove organic pollutants on the surface, and finally rinsed with deionized water. Wash the substrate with N 2 Air blow dry.

[0022] The cleaned and dried substrate was quickly transferred to the pulsed laser deposition (PLD) chamber, and during the deposition process, the air pressure in the chamber was kept at 5×10 -4 Pa, the target base distance is fixed at 4cm, and the pulse laser frequency is fixed at 3Hz. Because the Pt target is very strong, the intensity of laser energy used t...

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Abstract

The invention belongs to the field of design of surface acoustic wave sensors, and particularly relates to a high-temperature stable electrode and a preparation method thereof. The high-temperature stable electrode sequentially comprises an aluminum oxide barrier layer, a zinc oxide buffer layer, a Pt electrode, an ITO protective layer and an aluminum oxide protective layer from bottom to top, theITO protective layer is arranged on the Pt electrode, and the ITO protective layer and the Pt electrode are coated with the aluminum oxide protective layer. According to the invention, ITO (Indium Tin Oxide) is utilized to inhibit the caking phenomenon of a Pt electrode at a high temperature; meanwhile, the ITO has good electrical conductivity at high temperature, when Pt is caked at high temperature, discontinuous holes can be filled with the ITO, the resistivity of the electrode is effectively reduced, and the stability of the electrode in a high-temperature state is improved.

Description

technical field [0001] The invention belongs to the design field of surface acoustic wave sensors, specifically a high-temperature stable electrode and a preparation method thereof, and provides an ITO / Pt composite film electrode, which improves the electrical conductivity of surface acoustic wave device electrodes so that it can withstand high temperatures. Stability has been improved. Background technique [0002] Surface Acoustic Wave (SAW) is an elastic wave that propagates along the surface of an object. SAW devices are various devices that use the propagation of SAW on piezoelectric substrates to process signals. The SAW device is composed of a piezoelectric material substrate and an interdigital transducer (Interdigital, IDT) on its surface. [0003] Piezoelectric material is an important part of surface acoustic wave devices. It plays the role of converting electrical signals and surface acoustic waves, and also serves as a medium for surface acoustic waves to propa...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/02H03H9/02
CPCH03H3/02H03H9/02637H03H9/02834
Inventor 彭斌王博文刘兴鹏张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA