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Piezoelectric vibrator for vibration wave motor

A vibrator, vibration wave technology, applied in the directions of generators/motors, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, etc., can solve the problem of motor speed reduction power consumption etc.

Active Publication Date: 2019-08-09
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In other words, such replacement causes the problem that the motor speed decreases and the power consumption during driving (ie, input power at a constant speed of 0.2 m / s, for example) increases

Method used

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  • Piezoelectric vibrator for vibration wave motor
  • Piezoelectric vibrator for vibration wave motor
  • Piezoelectric vibrator for vibration wave motor

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0155] First, piezoelectric ceramics are obtained by firing metal oxide powders. As a result of measuring the composition of piezoelectric ceramics by X-ray fluorescence (XRF) analysis, with respect to 100 parts by weight of (Ba 0.86 Ca 0.14 ) 0.989 (Ti 0.93 Zr 0.07 )O 3 , the piezoelectric ceramics contained 0.16 parts by weight of Mn as metal and 0.28 parts by weight of Bi as metal. The content of lead is less than 200ppm. As a result of analyzing the crystal structure of the piezoelectric ceramic by X-ray diffraction (XRD) measurement, it was proved that the piezoelectric ceramic has a perovskite structure. Therefore, piezoelectric ceramics contain lead-free perovskite metal oxides. As a result of measuring the density of piezoelectric ceramics by the Archimedes method, the density was 5.7×10 3 kg / m 3 .

[0156] Then, the piezoelectric ceramic is processed into 10×2.5×0.5mm 3 to measure various parameters of piezoelectric ceramics. The test piece of the piezoele...

example 10

[0179] In Example 10, sodium niobate, barium titanate, and trimanganese tetraoxide were used as raw material powders, and were mixed together so that Na, Ba, Nb, Ti, and Mn formed relative to (Na 0.88 Ba 0.12 )(Nb 0.88 Ti 0.12 )O 3 A component containing 0.032 parts by weight of Mn. The mixed powder was fired at a maximum temperature of 1150° C. for 5 hours.

[0180] As a result of measuring the composition of piezoelectric ceramics by ICP atomic emission spectroscopy, with respect to 100 parts by weight of (Na 0.88 Ba 0.12 )(Nb 0.88 Ti 0.12 )O 3 Contains 0.032 parts by weight of Mn as metal and less than 200 ppm of lead. As a result of analyzing the crystal structure of the piezoelectric ceramic by X-ray diffraction (XRD) measurement, it was found that the crystal structure was a perovskite structure. In addition, as a result of measuring the density of piezoelectric ceramics by the Archimedes method, the density was 4.5×10 3 kg / m 3 .

[0181] Then, the piezoelec...

example 11

[0189] In Example 11, piezoelectric ceramics were obtained by firing a metal oxide powder having a composition different from that in Example 1. As a result of measuring the composition of piezoelectric ceramics by X-ray fluorescence (XRF) analysis, with respect to 100 parts by weight of (Ba 0.90 Ca 0.10 )TiO 3 Mn is contained in an amount of 0.12 parts by weight in terms of metal, and the content of lead is less than 200 ppm. As a result of analyzing the crystal structure of the piezoelectric ceramic by X-ray diffraction (XRD) measurement, it was found that the crystal structure was a perovskite structure. Piezoceramics thus consist of perovskite metal oxides made from barium titanate substitutes. In addition, as a result of measuring the density of piezoelectric ceramics by the Archimedes method, the density was 5.6×10 3 kg / m 3 .

[0190] Then, the piezoelectric ceramic is processed into 10×2.5×0.5mm 3 to measure various parameters of piezoelectric ceramics. The test...

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Abstract

A vibrator made of non-lead-based piezoelectric material is disclosed, capable of being driven at sufficient speed with low power consumption, particularly for vibration wave motors, which includes apiezoelectric element (101) comprising a piezoelectric material (3) with electrodes (1, 2) and an elastic body (5), wherein less than 1000 ppm of a Pb component is contained in the piezoelectric material, and vibration modes A and B, having resonance frequencies fA and fB, generating vibration waves in the elastic body with wave fronts intersecting each other, satisfy |fB - fA| > 2 kHz, preferablya (Ba,Ca)(Ti,Zr)O3 based rectangular vibrator with two out-of-plane bending modes having perpendicular nodal lines.

Description

technical field [0001] The present invention relates to a vibrator, and the present invention also relates to an oscillatory wave drive device, an oscillatory wave motor, and an electronic device each using the vibrator. Background technique [0002] Recently, size reduction and capability improvement of electronic devices have progressed, and ultrasonic motors have also been required to be smaller in size and operate at higher speeds with lower power consumption. PTL 1 discloses an ultrasonic motor employing a vibrator including a rectangular vibrating plate and a piezoelectric element, and driven in a combination of two vibration modes, ie, normal vibration and feeding vibration. [0003] Typically lead zirconate titanate (PZT) based materials are used as piezoelectric ceramics used in vibrators. These materials are in the ABO 3 Type perovskite metal oxides contain a large amount of lead at the A site, so the impact on the environment is considered to be a problem. In o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/00H01L41/187G02B7/10
CPCH02N2/001H02N2/0015H02N2/026G02B7/005G02B7/023H10N30/8536H10N30/8542G02B7/04H02N2/065H10N30/8561
Inventor 古田达雄渡边隆之上田未纪小山信也久保田纯松田坚义上林彰林润平西谷仁志
Owner CANON KK