Sintering furnace and tantalum capacitor sintering method

Abstract

The invention provides a sintering furnace and a tantalum capacitor sintering method. The sintering furnace comprises an intake pipeline, a gas circulating pump, a gas heater, a sintering cavity, a condenser and a vacuum pump set. The intake pipeline communicates with an input end of the gas circulating pump; an output end of the gas circulating pump communicates with an input end of the gas heater; an output end of the gas heater communicates with an intake port of the sintering cavity; an exhaust port of the sintering cavity communicates with an input end of the condenser; an output end of the condenser communicates with an input end of the gas circulating pump; and the vacuum pump set communicates with the sintering cavity. Tantalum capacitors finish the bonding agent removing process and the sintering process in the same equipment, so that the oxygen contact risk caused by migration of the tantalum capacitors between different processes is prevented, the content of oxygen impurities generated by tantalum materials is reduced, and the quality and the yield of the tantalum capacitors are improved; and as the two process flows have no need to be singly performed, the migration time is saved, and the production efficiency is improved.

Description

technical field [0001] The present application relates to the technical field of sintering equipment, in particular, to a sintering furnace and a sintering method for tantalum capacitors. Background technique [0002] Valve metal powders are often used as anode condensation powders for capacitors. The most commonly used valve metal material is tantalum, and the capacitor with tantalum as the anode is called a tantalum capacitor. In the manufacturing process of tantalum capacitors, the anode tantalum block is formed by powder pressing and sintering. A chemical binder needs to be added during the powder compaction process, and the chemical impurities of the binder will have an important impact on the electrical performance and reliability of the capacitor during the sintering process. Therefore, before sintering the tantalum block anode, it is necessary to complete the process of removing the binder from the tantalum block. In the traditional process, the process of removin...

AI Technical Summary

Problems solved by technology

When the anode is formed, the natural oxide with crystalline structure will act as an effective crystal nucleus under the action of temperature and field strength, and continue to grow on the substrate of the amorphous dielectric layer to cause damage to the dielectric layer, which will seriously affect the leakage of the capacitor. current and reliability

In the subsequent molding and aging process, due to the impact of thermal stress and electric field, the damage to the defects of the dielectric layer will be aggravated, resulting in capacitor failure or breakdown, reducing the product yield and product quality

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