Multi-purpose combined type grid bias power supply for plasma coating

Abstract

The invention belongs to the technical field of automatic control technology and power electronics, and particularly relates to a multi-purpose combined type grid bias power supply for plasma coating.The power supply can output direct current negative bias voltage, unipolar pulse negative bias voltage with different output waveform characteristics as required, a direct current superposition unipolar pulse negative bias voltage mode, an asymmetric bipolar pulse bias voltage mode or a direct current superposition bipolar pulse bias voltage. Moreover, the pulse voltage amplitude, the frequency and the duty ratio of the negative bias voltage can be adjusted, the direct-current voltage amplitude of the direct-current superposition pulse negative bias voltage can be adjusted, the high-voltage low-current mode or the low-voltage high-current mode of the negative bias voltage can be set, and the positive pulse voltage amplitude and the duty ratio can be adjusted.

Description

technical field [0001] The invention belongs to the fields of automatic control technology and power electronics technology, and in particular relates to a multipurpose composite plasma coating bias power supply. Background technique [0002] The bias power supply is widely used in the plasma coating process, which has a crucial impact on the characteristics of the film. Different coating processes require bias power supplies with different output waveform characteristics and different voltage levels. Divided from the output waveform characteristics, the main DC negative bias power supply, unipolar pulse negative bias power supply, DC superimposed unipolar pulse negative bias power supply and asymmetric bipolar pulse bias power supply, common bias power supply output The waveform characteristics are single, and can only have one or two output waveform characteristics, which brings inconvenience to the research of coating process, and different bias power supplies need to be ...

AI Technical Summary

Problems solved by technology

Divided from the output waveform characteristics, the main DC negative bias power supply, unipolar pulse negative bias power supply, DC superimposed unipolar pulse negative bias power supply and asymmetric bipolar pulse bias power supply, common bias power supply output The waveform characteristics are single, and can only have one or two output waveform characteristics, which brings inconvenience to the research of coating process, and different bias power supplies need to be replaced for different processes

Images