Temperature control system, photoetching device and temperature control method

Abstract

The invention discloses a temperature control system, a photoetching device and a temperature control method. The temperature control system comprises: a temperature control medium supply module whichis used for providing temperature control air flow for a cold and heat output module; the cold and heat output module which comprises a vortex tube in multi-stage series connection and is used for outputting cold and / or heat to a temperature control object; a temperature control detection module which is used for detecting temperature control parameters, wherein the temperature control parametersat least comprise cold air flow and cold air temperature corresponding to output cold and / or hot air flow and heat temperature corresponding to output heat and the temperature of the temperature control object; and a control module which is used for adjusting the cold air flow and the cold temperature and / or the hot air flow and the heat temperature according to the temperature control parametersso as to enable the temperature of the temperature control object to reach a target temperature. The system increases the output of cold or heat, enlarges the temperature control range of the vortextube, simultaneously carries out the rapid output of the heat and the cold and solves the problem of energy waste.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of temperature control, and in particular, to a temperature control system, a photolithography device, and a temperature control method. Background technique [0002] Vortex tube refrigeration has been widely used in modern industry. For example, in the semiconductor manufacturing production line, the lithography machine has the characteristics of being in operation for a long time, and the cooling of the mask table also needs to quickly output the cooling capacity and keep it stable. At the same time, it needs to have a small and light refrigeration system. The vortex tube refrigeration method only needs to consume the compressed air provided by the factory air compressor to quickly cool the mask table of the photolithography machine, and avoids the traditional refrigeration system such as vapor compression refrigeration. Refrigerant consumption and pollution problems reduce costs and...

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Problems solved by technology

[0004] In view of this, the object of the present invention is to propose a temperature control system, photolithography device and temperature control method to increase the output of cold or heat, expand the temperature control range of the vortex tube, improve the temperature control accuracy, and realize heat and heat. The rapid output of cooling capacity can improve the problem of energy waste

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