Mass transfer device and mass transfer method

Abstract

The invention provides a mass transfer device and a mass transfer method. The mass transfer device comprises a first bearing platform; a second bearing platform which bears a target substrate and is opposite to the first bearing platform; a roller which is arranged between the first bearing platform and the second bearing platform, wherein a rotating shaft of the roller is parallel to the bearingsurface of the first bearing platform, a plurality of groups of pickup units are arranged on the outer peripheral surface of the roller at intervals in the circumferential direction, each group of pickup units comprises a plurality of pickup points which are arranged at intervals in the axial direction of the roller, and the distance between every two adjacent pickup points in the same group of pickup units in the axial direction of the roller is greater than the distance between the micro elements on the first bearing table. The first bearing platform translates in a first direction relativeto the roller, wherein the first direction is the rotating tangent direction of the roller at the contact point of the peripheral surface of the roller and the first bearing surface; the second bearing platform translates in the direction opposite to the first direction relative to the roller. According to the invention, the mass transfer working efficiency of the micro-elements is improved, the transfer alignment precision is high, and the product yield is high.

Description

technical field [0001] The invention relates to the technical field of semiconductor display, in particular to a mass transfer device and a mass transfer method. Background technique [0002] Micro-LED (miniature light-emitting diode) is to miniaturize and matrix the traditional LED (light-emitting diode) structure, and use CMOS (Complementary Metal Oxide Semiconductor, Complementary Metal Oxide Semiconductor) integrated circuit technology to make a driving circuit to realize Each pixel is addressable and individually driven display technology. Since the brightness, life, contrast, response time, energy consumption, viewing angle and resolution of Micro-LED technology are stronger than those of LCD and OLED technology, plus it is self-illuminating, simple in structure, small in size and energy-saving. The advantages of the display technology have been regarded as the next generation of display technology by many manufacturers and have begun to actively lay out. [0003] On...

AI Technical Summary

Problems solved by technology

In this way, each Micro-LED chip on the wafer needs to be cut individually, and then arranged on the blue film according to the required pitch size on the integrated circuit, and then transferred to the integrated circuit in large quantities, and the work efficiency is very low. , and the transfer alignment accuracy is poor

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