Manufacture method for large-size 5N high-purity aluminum target material

Abstract

The invention relates to a manufacture method for a large-size 5N high-purity aluminum target material. When large-size 5N high-purity aluminum is rolled to a certain thickness, in the width direction, temperatures, ranging from T1 to Tn, of rollers are detected every 100 mm to 300 mm, or temperatures of the 5N high-purity aluminum target material are detected every 100 mm to 300 mm in the width direction; and according to the temperature curve chart, a specific working roller cooling curve is set, uniformity of the rolling temperature of the rollers and the 5N high-purity aluminum target material can be ensured in the subsequent rolling pass process, and therefore uniformity, in the width direction, of the large-size 5N high-purity aluminum target material is ensured. The large-size 5N high-purity aluminum target material manufactured through the manufacture method is good in crystal grain uniformity, simple in technological process, short in production period, high in production efficiency and high in finished product rate and has production and market competitive advantages.

Description

technical field [0001] The invention relates to the technical field of nonferrous metals, in particular to a method for preparing a large-size 5N high-purity aluminum target. Background technique [0002] For the production of G5.0 or G5.5 generation line targets, if the target width is about 1580mm, it is necessary to purchase target ingots with a width of more than 1580mm. However, when formed by ordinary rolling process, since the ingot width is larger than the conventional width, it is difficult to meet the requirement of grain uniformity in the transverse direction. This is mainly due to the fact that there is a temperature difference between the middle and the edge of the ingot during the rolling process, resulting in a difference in the actual recovery process, which in turn causes the problem of uneven grains at the edge and the middle. [0003] In order to solve the above technical difficulties, generally speaking, an intermediate tempering process is adopted. Tha...

AI Technical Summary

Problems solved by technology

Although this type of production method can achieve the uniformity of grains along the width direction of the same target material, it not only has many production processes, but also takes a long time, low efficiency, and low yield, and it is more likely to cause the same batch of different plates. Grain Variation