A method for improving grain uniformity of molybdenum and its alloy sputtering targets
A technology of sputtering target material uniformity, applied in sputtering coating, metal material coating process, vacuum evaporation coating, etc. inequality problem
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Embodiment 1
[0030] A method for improving the uniformity of the crystal grains of a molybdenum sputtering target material (the target material is pure molybdenum), which specifically includes the following steps:
[0031] 1) Use industrial molybdenum powder with a Fischer particle size of 2.9μm and mill it in a ball mill for 8 hours, with a ball-to-battery ratio of 2:1. Then classify to obtain molybdenum powder with a Fischer particle size of 3.2 μm, in which the content of particles below 1 μm is 4.5%, and the content of particles below 0.5 μm is 0.8%;
[0032] 2) The molybdenum powder obtained in step 1) is formed by cold isostatic pressing to obtain a pressed slab with a pressing pressure of 1.6 tons / cm 2 , The thickness of the pressed slab is 35mm;
[0033] 3) The pressed slab is sintered in a microwave-resistance vacuum furnace. After the microwave is heated to 1500℃, it is changed to resistance heating, and the heating speed is controlled to make the vacuum degree of the heating process 1×...
Embodiment 2
[0044] A method for improving the uniformity of crystal grains of molybdenum sputtering target material, which specifically includes the following steps:
[0045] 1) Use industrial molybdenum powder with a Fischer particle size of 3.5μm and mill it in a ball mill for 5 hours, with a ball-to-battery ratio of 2:1. Then classify to obtain molybdenum powder with a Fischer particle size of 3.7 μm, in which the content of particles below 1 μm is 3.9%, and the content of particles below 0.5 μm is 0.65%;
[0046] 2) The molybdenum powder obtained in step 1) is formed by cold isostatic pressing to obtain a pressed slab with a pressing pressure of 1.8 tons / cm 2 , The thickness of the pressed slab is 29mm;
[0047] 3) The pressed slab is sintered in a microwave-resistance vacuum furnace. After the microwave is heated to 1500℃, it is changed to resistance heating, and the heating speed is controlled to make the vacuum degree of the heating process 1×10 -2 Below Pa, the vacuum degree of the heat ...
Embodiment 3
[0053] A method for improving the uniformity of crystal grains of molybdenum sputtering target material, which specifically includes the following steps:
[0054] 1) Use industrial molybdenum powder with a Fischer particle size of 4.2μm and mill it in a ball mill for 4 hours, with a ball-to-battery ratio of 2:1. Then classify to obtain molybdenum powder with a Fischer particle size of 4.3 μm, of which 2.4% of particles below 1 μm and 0.3% of particles below 0.5 μm;
[0055] 2) The molybdenum powder obtained in step 1) is formed by cold isostatic pressing to obtain a pressed slab with a pressing pressure of 2 tons / cm 2 , The thickness of the pressed slab is 22mm;
[0056] 3) The pressed slab is sintered in a microwave-resistance vacuum furnace. After the microwave is heated to 1500℃, it is changed to resistance heating, and the heating speed is controlled to make the vacuum degree of the heating process 1×10 -2 Below Pa, the vacuum degree of the heat preservation stage is 1×10 -3 Belo...
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