A Prediction Method for Polished Surface Topography of Optically Hard and Brittle Materials

Abstract

The invention belongs to the field of material processing technology, and in particular relates to a method for predicting the surface morphology of polished optically hard and brittle materials. The method includes the following steps: determine the contact information between the micro-convex peaks and the workpiece; obtain the abrasive particle size distribution function; obtain the effective abrasive particle number based on the contact information and the pre-obtained polishing fluid concentration; combine the contact information and the abrasive particle size distribution function , determine the relative movement mode between abrasive grains and workpieces; determine the removal method of surface material on the workpiece and the resulting trace contour based on the relative movement between abrasive grains and workpieces; according to the stress of a single abrasive grain, combined with the relative movement of the polishing head According to the movement of the workpiece, the movement trajectory of the abrasive grains is obtained; according to the relative movement pattern between the abrasive grains and the workpiece and the movement trajectory of the abrasive grains, the topography of the workpiece surface is obtained. The prediction results of the prediction method provided by the present invention are more accurate, and at the same time, it provides a reference for parameter settings in the polishing process of optically hard and brittle materials, thereby improving polishing efficiency.

Description

technical field [0001] The invention belongs to the technical field of material processing, and in particular relates to a method for predicting the surface morphology of optical hard and brittle materials after polishing. Background technique [0002] Facing the major demand for optoelectronic systems in the fields of national defense security, aerospace, and new generation information technology, the requirements for processing accuracy and processing efficiency of optical components are increasing day by day. As the last process in the processing of optical components, the polishing process is very important to ensure the processing quality and service life. [0003] In order to meet the machining accuracy of optical components, it is usually necessary to repeatedly check whether the surface shape of the machined surface meets the precision requirements during the machining process, and then adjust the machining parameters to determine whether to continue machining or ter...

AI Technical Summary

Problems solved by technology

[0004] However, most of the existing hard and brittle material polishing prediction models predict the material removal rate, and most of the predictions are based on the Preston empirical equation

When establishing the prediction model of processing surface morphology, the different material removal methods of abrasive particles due to different movement modes of sliding and rolling and the influence of centrifugal motion of abrasive particles on the processing morphology during the process of abrasive particle movement driven by the polishing head are not considered. , leading to relatively large prediction errors

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