Array reflection type microscopic image acquisition system

Abstract

The invention discloses an array reflection type microscopic image acquisition system, which comprises a microscopic camera module array and a receiving end; the microscopic camera module array is located right above a sample table; the microscopic camera module array comprises a plurality of microscopic camera modules which are distributed in an array. Each microscopic camera module comprises a first lens group, a reflective illumination structure, an excitation light source, a second lens group and an image sensor; the first lens group and the second lens group are symmetrically arranged, the image sensor is electrically connected with the receiving end, the excitation light source is located on one side of the reflective illumination structure, and a light source emitted by the excitation light source irradiates the reflective illumination structure. According to the invention, a plurality of areas of a sample can be simultaneously collected, the detection speed is improved, and thesystem is suitable for detecting opaque large-area samples such as silicon wafers, semiconductor microscopes, biological chips, thick biological samples and the like.

Description

Technical field [0001] The invention belongs to the technical field of machine vision detection, and particularly relates to an array reflection type microscopic image acquisition system, which can be applied to high-throughput microscopic imaging of semiconductor wafers and biological samples. Background technique [0002] Micro imaging system is an optical system or instrument that can magnify and image tiny objects or details that are difficult for the human eye to observe or distinguish, so that people can extract detailed structure information. Related products are widely used in fields involving experimental research, manufacturing, etc. . With the development of related disciplines in the microscopic field, microscopic imaging systems based on many cutting-edge theories have broken the limits of optical imaging and are moving towards higher resolution. [0003] However, in terms of practical application, the traditional microscopic imaging system is limited by the optical s...

AI Technical Summary

Problems solved by technology

[0003] However, in terms of practical application, the traditional microscopic imaging system is limited by the optical structure, and must rely on a high-resolution objective lens with a small field of view (within 3°) and a long conjugate distance to achieve optical magnification, resulting in optical system Large, complex, and expensive

At the same time, due to the small field of view, the traditional microscopic system needs to adopt the method of scanning and mosaic when forming a complete image of a larger sample. The introduction of related equipment makes its cost more expensive, and it will also make the microsystem The precise structure is more easily affected by external factors, such as vibration, temperature, etc.

Thirdly, the working mode of scan stitching results in long imaging time, which is less efficient for large-area samples like semiconductor wafers

[0004] All in all, traditional microscopes are generally bulky, costly, and the imaging process of large samples is complicated and time-consuming, which is difficult to meet the needs of existing microscopic inspection of semiconductor and biological samples

[0005] In summary, realizing a large-sample microscopic imaging system with large field of view, high resolution, strong stability, high throughput, and low cost is an urgent problem with high practical value.

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