Method for machining micro-nano structure with antireflection function of large-format transparent curved surface part and system

Abstract

The invention relates to a method for machining a micro-nano structure with an antireflection function of a large-format transparent curved surface part and a system. The problems that the surface ofthe antireflection micro-nano structure of the large-format curved surface part is low in precision and poor in consistency are solved. When in machining, a process database is established firstly, and the heating effect damage laser damage threshold value w0 of the laser power on a material substrate is confirmed; secondly, the rear working distance L1, the workpiece positioning and installing, the transmission type precise focusing, the laser machining parameters setting of a laser machining system are sequentially measured, and transmission type machining is carried out; in the machining process, automatic focusing of the laser can be realized, the floating of the laser power in the machining process can be detected on line in real time, and the pointing deviation of a machining light beam can be further monitored in real time. When a functional micro-nano structure is required to be manufactured on the inner surface of a non-spherical transparent medium, the machining mode is compared with a traditional mode of directly machining from the inner surface, and the method has the advantages of simplicity, high precision, high efficiency and the like.

Description

technical field [0001] The invention belongs to the field of laser processing, and in particular relates to a method and system for processing micro-nano structures of large-scale transparent curved surface parts. Background technique [0002] There are a large number of large-format transparent curved surface components in my country's aerospace and automotive fields, which are used as protective windows (such as fairings, protective windows, etc.) for aerospace vehicles, aircraft, and missiles, and play a role in sealing and internal optical path protection. In order to meet certain functional requirements of the overall system, this type of component needs to etch various functional structures on its internal surface, such as realizing frequency selection, anti-reflection and anti-reflection, etc., but the processing of such parts is particularly difficult to process materials (spinel , sapphire, zinc sulfide), large format, special surface type (both non-expandable asphe...

AI Technical Summary

Problems solved by technology

[0003] The present invention analyzes the reasons for the low accuracy and poor consistency of anti-reflective micro-nano structures on the surface of large-scale curved parts, and aims at the problems of large component area and curvature and limited focal length, which cause mechanical interference between the laser processing head and the component, resulting in light blocking or laser Due to the problems that the normal incident on the processing surface cannot be processed or the processing quality is reduced, a method and system for processing micro-nano structures with anti-reflection function for large-format transparent curved surface parts are provided. The transmission processing method is adopted. This method is simple and high-precision. , high efficiency and other advantages

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