Novel processing device for semiconductor or photovoltaic material
A technology for photovoltaic materials and processing equipment, applied in metal material coating process, semiconductor/solid-state device manufacturing, gaseous chemical plating, etc. To achieve the effect of flexible adjustment and control
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[0038] Such as Figure 1 to Figure 6 As shown, a new type of processing equipment for semiconductor or photovoltaic materials includes a furnace body 1, a furnace door 2, and an electrode structure is arranged on the furnace door 2. The electrode structure includes an electrode column 3-7, an electrode body 3-5 and insulating materials. The electrode column 3-7 is connected with the electrode main body 3-5, and the insulating material covers the side of the electrode column 3-7. By insulating and covering the electrode columns, only two ends of the electrode columns 3-7 are exposed. It will be more convenient when the furnace door 2 is connected to the electrode structure in the graphite boat, and it will be easier to form a uniform electric field and realize plasma-enhanced chemical vapor phase. deposition. Such as figure 1As shown, the graphite boat will be placed in parallel in the furnace body 1, and the silicon wafers on the graphite boat will also be placed in parallel...
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