Laser amplification device
A laser amplification and amplifier technology, applied in lasers, laser parts, optics, etc., can solve problems such as increased power consumption, increased electrostatic capacitance, time delay, etc., to reduce equipment manufacturing costs, improve processing quality and productivity.
Pending Publication Date: 2019-11-29
TECHNICS
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Problems solved by technology
[0003] In the laser scribing process, when applied to a process below the nanometer size, problems such as increase in electrostatic capacitance, time delay, increase in power consumption, and mutual interference noise occur as the wiring interval becomes narrower.
In order to solve these problems, an interlayer insulating film is introduced on the surface of the semiconductor chip. In this case, when the wafer is diced by the conventional aluminum wheel cutter method, there is a disadvantage that the substance of the interlayer insulating film adheres to the surface of the diamond wheel cutter.
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[0027] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily implement them. However, the present invention can be implemented in various forms and is not limited to the embodiments described here. In addition, in order to clearly describe the present invention, parts irrelevant to the description are omitted from the drawings, and similar reference numerals are assigned to similar parts throughout the specification.
[0028] Throughout the specification, when it is described that a certain part is "connected" to another part, not only the case of "directly connected" but also the case of "electrically connected" "with other elements interposed therebetween" are included. In addition, throughout the specification, when it is described that a certain component "includes" a certain component, unless there is a statement to the contrary, it means that other components ...
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A laser amplification device is disclosed. The disclosed laser amplification device comprises a seed beam light source for supplying a seed beam and a solid amplifier for amplifying the output of theseed beam, wherein the solid amplifier comprises: a laser medium; a pumping beam light source for supplying a pumping beam exciting the laser medium; a pumping beam mirror for reflecting, to the lasermedium again, the pumping beam having passed through the laser medium; a plurality of dichroic mirrors for reflecting the seed beam such that the seed beam passes through the laser medium by the samepath as the pumping path of the pumping beam; and a plurality of mirrors arranged on the optical path of the seed beam.
Description
technical field [0001] The invention relates to a laser amplifying device, in particular to a laser amplifying device using a solid amplifier to amplify fiber seed laser light. Background technique [0002] In the semiconductor process, the use of laser application technology has been gradually expanded. Based on this, in the fields that require precise microfabrication of products and components in the microelectronics industry such as semiconductors, displays, PCBs, and smartphones, investment has improved production efficiency and production. The revolutionary novel laser technology has attracted much attention. [0003] In the laser scribing process, when applied to a process below the nanometer size, problems such as an increase in electrostatic capacitance, a time delay, an increase in power consumption, and mutual interference noise occur as the wiring interval becomes narrower. In order to solve these problems, an interlayer insulating film is introduced on the surf...
Claims
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Login to View More IPC IPC(8): H01S3/08H01S3/10G02B27/14
CPCH01S3/08013H01S3/08054H01S3/10007H01S3/10061G02B27/141H01S3/094084H01S3/2308
Inventor 陈大铉
Owner TECHNICS