Large curvature-radius free-form surface mirror surface surface shape interference measurement device and method

Abstract

The invention discloses a large curvature-radius free-form surface mirror surface surface shape interference measurement device and method. The measurement device comprises an interferometer, a CGH and an optical lens, 5 diffraction areas, that is, a main detection area, an optical lens alignment area, an interferometer alignment area, a mirror surface reference area and a lens reference area, arearranged in the CGH to adjust the positions among optical devices in the device, so as to ensure accurate alignment of various optical elements in a detection optical path. According to the measurement device disclosed by the invention, the length of the detection optical path is reduced by using the optical lens, meanwhile, zero compensation is performed on a to-be-measured free-form surface reflector in combination with a computer-generated holography element, the problems of relatively high requirements for the measurement environment and relatively large measurement difficulty due to therelatively long optical path of the detection optical length during the detection of the large curvature-radius optical elements in the prior art are solved, a guarantee is provided for the manufacturing and development of modern advanced optical systems, and the measurement device has the advantages of high detection accuracy, simple detection site environment, simple size requirements, etc.

Description

technical field [0001] The invention belongs to the field of optical detection, and more specifically relates to a large curvature radius free-form mirror surface shape interference measurement device and method. Background technique [0002] With the advancement of national technology, space exploration, ground remote sensing, aviation, aerospace, lighting, display and other fields have put forward higher requirements for light weight, miniaturization, and system image quality optimization of optical systems. Applying the freeform surface to the optical system can improve the degree of freedom in system optimization, reduce the design residual of the optical system and the number of optical components, and simplify the structure of the optical system while improving the image quality of the system. The above advantages enable optical system designers to break through the concept of traditional optical systems and use free-form surfaces in new system design schemes according...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to provide a large curvature radius free-form mirror surface shape interferometric device and method, aiming to solve the problem of the prior art due to the relatively short optical path of the detection optical path when detecting large curvature radius optical elements. The problem of difficult measurement due to high requirements on the measurement environment due to long

Images