High-precision online electroforming stress detection method based on heat balance condition

Abstract

The invention discloses a high-precision online electroforming stress detection method based on a heat balance condition. A stable heating method is adopted to improve the stability of an electroforming solution under heating, so that the electroforming solution can be also used to detect the stress of a casting layer precisely under the heating condition; a cathode substrate is made of a materialwhose elasticity modulus is the same with or similar to that of the casting layer; a laser generator and a wavefront sensor are arranged, so that laser irradiates a detection area of a polished surface of the cathode substrate, is reflected from the polished surface, and then irradiates a receiving window of the wavefront sensor; and the laser phase curvature radius is obtained according to a reflected laser wavefront phase diagram in the electroforming process, a substrate curvature radius is calculated and substituted into a stonery formula to calculate the average stress of the casting layer. According to the invention, an online detection mode is used to obtain the relation between the stress and thickness of the casting layer, and detection basis is provided for research on casting layer stress reduction. The stress of the casting layer is detected, and the requirement for high detection precision is met.

Description

technical field [0001] The invention relates to a method for online detection of electroforming stress, which is mainly applied to the detection of electrochemical deposition film stress. Background technique [0002] With the development of micro-electromechanical systems (MEMS), the manufacturing technology of tiny and complex parts that can meet its specific functions and needs has been attracting attention. Micro-electroforming technology has the advantages of low cost, high aspect ratio processing, and high replication accuracy. It is one of the main technologies for preparing MEMS micro-devices and metal microstructures. It has been widely used in the manufacture of aerospace, precision machinery, and automotive electronics. , biomedicine, and some special structural components in the national defense industry. However, the macroscopic internal stress in the casting layer affects the structural forming accuracy and mechanical properties of the part, resulting in preci...

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Problems solved by technology

[0005] Methods 1) and 2) are offline detection methods for electroforming stress, that is, stress detection is performed on the parts after electroforming, and online detection of the stress of the casting layer during the electroforming process cannot be performed.

Method 3) The stress of the cast layer can be detected online. However, according to the research and analysis of the inventors, the traditional laser detection device used in the traditional substrate deformation method has relatively complicated laser optical path settings, and convection due to temperature gradients when the electroforming liquid is directly heated. , The elastic modulus of the base and the cast layer does not match, and the detection accuracy of the sensor is poor, resulting in large measurement errors, and the detection accuracy needs to be improved

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