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Tensioning device and tensioning method for mask

A mask and sub-mask technology, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of FMM affecting the yield of display panels, etc., to improve deformation, alleviate deformation, and improve precision Effect

Active Publication Date: 2019-12-31
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Based on this, it is necessary to provide a mask plate stretching device and a stretching method to solve the problem that the folds of the FMM are stretched and affect the yield of the display panel.

Method used

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  • Tensioning device and tensioning method for mask
  • Tensioning device and tensioning method for mask
  • Tensioning device and tensioning method for mask

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Embodiment Construction

[0030] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0031] It should be noted that when an element is referred to as being “disposed on” another element, it may be directly on the other element or there may also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected t...

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Abstract

The invention relates to a tensioning device and a tensioning method for a mask. A first magnet and a second magnet which are opposite are arranged on two second frames extending in the Y-axis direction on a supporting frame, when a sub-mask is tensioned in the Y-axis direction, the sub-mask is under the action of tension, the magnetic metal frames shrink inwards and are deformed, at the moment, the first magnet and the second magnet can apply magnetic force of reversed direction to the magnetic metal frames in the X-axis positive direction and the X-axis negative direction correspondingly, the deformation of the magnetic metal frames can be relieved under the action of the magnetic force, the deformation caused by tensioning the sub-mask is relieved, the precision of the mask is improved,and the yield of a display panel is further improved; and in addition, the sub-mask is fixed to the supporting frame, the intensity of the sub-mask can be improved, and the stability of the mask evaporation and the stability in the washing process can be improved.

Description

technical field [0001] The invention relates to the display field, in particular to a mask plate stretching device and a stretching method. Background technique [0002] At present, in the vapor deposition process, a fine metal mask (FMM) is mostly used to vapor-deposit the organic light-emitting material on a predetermined position of the substrate. During the stretching process, the precision mask is stretched in one direction. After stretching, the unstretched ends are deformed, causing wrinkles on the FMM, which directly affects the evaporation effect and reduces the yield of the display panel. Contents of the invention [0003] Based on this, it is necessary to provide a mask plate stretching device and a stretching method for the problem that the folds generated when the FMM is stretched affect the yield of the display panel. [0004] A mask stretching device is used to fix a sub-mask, the sub-mask includes two magnetic metal frames extending along the Y-axis direct...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/12C23C14/24
CPCC23C14/042C23C14/12C23C14/24
Inventor 范柳彬李文星张蔡星付佳李金库
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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