OLED evaporation source convenient to assemble

Abstract

The invention discloses an OLED evaporation source convenient to assemble. The OLED evaporation source comprises a bottom plate, a first screw, a heating box, a heating wire, an evaporation vessel, aspring, a vibration plate, a sealing door, a heat insulation case, a vibration motor, a threaded sleeve, a discharge pipe, an electric valve, a second screw, a support, a semiconductor refrigeration piece and a heat dissipation opening. According to the OLED evaporation source convenient to assemble, the vibration plate is arranged on the inner wall of the bottom of the evaporation vessel, the vibration plate vibrates under the driving of the vibration motor, the heating speed and the cooling speed can be effectively increased, and the coating efficiency is increased; the electric valve is installed on the surface of the plurality of discharging pipes in a communicating mode so that the steam discharging speed can be effectively adjusted, the control is more humanized in control, and the convenience in the processing process is also increased to a certain extent; and when refrigeration is needed, the heating wire is turned off and the semiconductor refrigerating sheet is opened, the refrigeration can be effectively carried out so that heating evaporation can be rapidly stopped, and the device is simple in structure, convenient to use and suitable for popularization and application.

Description

technical field [0001] The invention relates to an evaporation source, in particular to an OLED evaporation source which is easy to assemble, and belongs to the technical field of evaporation. Background technique [0002] In the current OLED manufacturing, thin film battery manufacturing, coating and other processing technologies, the thermal evaporation source heating material is generally used for coating. The thermal evaporation source is mainly composed of an evaporation boat and a heating resistance wire. The evaporation boat is used to hold the evaporation material. , made of stainless steel, boron nitride, silicon, quartz and other materials, the shape is mainly cylindrical and conical, and the heating resistance wire is wound and fixed outside the evaporation boat, and the resistance wire is energized to heat and conduct the heat of the evaporation boat to realize the evaporation of the material. Finish coating. [0003] Due to the need for rapid vaporization of ra...

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Problems solved by technology

[0003] Due to the need for rapid vaporization of raw materials during the evaporation process, most evaporation boats used in evaporation are heated and evaporated by natural heating of resistance wires or electric heating wires, and there are no other auxiliary devices to accelerate evaporation, which affects evaporation to a certain extent. speed; at present, the evaporation boats inside most evaporation sources have no flow control function, and when flow control is required, they cannot be controlled; and, when the evaporation is over, the raw materials need to be cooled quickly to end the evaporation, but now most Natural cooling is adopted, and the cooling speed is slow

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