Laser cleaning equipment and method for electronic components
A technology of electronic components and laser cleaning, which is applied in the field of laser cleaning, can solve problems such as poor cleaning effect, achieve the effects of ensuring product performance, improving cleaning efficiency, and enhancing cleaning effect
Active Publication Date: 2020-12-01
深圳市佳康捷科技有限公司
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Problems solved by technology
[0005] The main purpose of the present invention is to propose a laser cleaning equipment for electronic components to solve the technical problem of poor cleaning effect in the existing chemical cleaning methods
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[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are intended to explain the present invention, but cannot be construed as limitations to the present invention. Based on the embodiments in the present invention, those skilled in the art do not make creative work premise All other embodiments obtained below all belong to the protection scope of the present invention.
[0027] In order to solve the above technical problems, the present invention proposes a laser cleaning equipment for electronic components, combined with figure 1 , figure 2 and image 3 , the laser cleaning equipment comprises a machine base 1, a processing table 2 movably arranged on the machine base 1, ...
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The invention discloses a laser cleaning facility for electron components. The laser cleaning facility for the electron components comprises a machine base, a machining table movably arranged on the machine base, a laser cleaning head arranged above the machining table and a laser generator for generating laser beams. The laser cleaning facility further comprises a first light beam shaping unit and a second light beam shaping unit arranged on the laser beam transmission light path. The first light beam shaping unit is used for coupling the laser beams generated by the laser generator into optical fiber, and the second light beam shaping unit is used for adjusting the shape and energy distribution of focusing light spots emitted by the laser cleaning head. Through the laser cleaning facility for the electron components, the microelectronic device cleaning effect can be enhanced, the microelectronic device product performance is guaranteed, and meanwhile the cleaning efficiency is improved. In addition, the invention further discloses a laser cleaning method for the electron components.
Description
technical field [0001] The invention relates to the technical field of laser cleaning, in particular to a laser cleaning device and method for electronic components. Background technique [0002] As we all know, during the manufacturing process of microelectronic devices, non-conductive oxide layer and pollution particles are easy to be formed on the surface, and the oxide layer and pollution particles will cause damage to the microelectronic device. [0003] In the prior art, in order to remove the oxide layer and pollutant particles existing on the surface of the microelectronic device, chemical reagents are usually used to clean the surface of the microelectronic device. [0004] However, although cleaning with chemical reagents can remove the oxide layer and pollution particles, new pollutants will be introduced at the same time, and cleaning with chemical reagents will also affect the product performance of the microelectronic device. Contents of the invention [000...
Claims
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IPC IPC(8): B08B7/00
CPCB08B7/0042
Inventor 肖海兵姜家吉周泳全陈树林
Owner 深圳市佳康捷科技有限公司