Bidirectional semiconductor discharge tube and preparation method thereof

Abstract

The invention belongs to the technical field of semiconductor devices and provides a bidirectional semiconductor discharge tube and a preparation method thereof. The bidirectional semiconductor discharge tube comprises a substrate layer, and a first device layer and a second device layer which are respectively arranged at two sides of the substrate layer; and the structures of the first device layer and the second device layer are symmetrically arranged; the first device layer comprises a diffusion layer, an isolation layer, a metal layer, a plurality of cathode regions, and a heavily doped region; the diffusion layer has a second conductivity type; the isolation layer is used for dividing the diffusion layer into a valid anode region and an invalid anode region; the plurality of cathode regions have a first conductivity type; the heavily doped region is arranged between the valid anode region and the isolation layer; and the heavily doped region has a first conductivity type. According to the bidirectional semiconductor discharge tube and the preparation method thereof of the invention, the heavily doped region with the doping concentration greater than the doping concentration ofthe substrate layer is arranged between the valid anode region and the isolation layer, so that the bidirectional semiconductor discharge tube still has a low capacitance capability when meeting a breakdown voltage, and the problem that signal distortion is easily caused by high capacitance of a TSS device in a communication line is solved.

Description

technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to a bidirectional semiconductor discharge tube and a preparation method thereof. Background technique [0002] TSS (Thyristor Surge Suppressor, voltage switching transient suppression diode) is also called a semiconductor discharge tube, or a solid discharge tube, etc., because TSS can absorb voltage shocks and voltage surges, it plays an important role in the lightning protection of signal circuits Function, its working principle is similar to that of a gas discharge tube. When the overvoltage at both ends of the TSS exceeds the breakdown voltage of the TSS, the TSS clamps the overvoltage to a potential lower than the breakdown voltage close to 0V, and then the TSS continues this Short-circuit state, until the overcurrent flowing through TSS drops below the critical value, TSS returns to open-circuit state. As an important component, TSS can not only absorb the indu...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a bidirectional semiconductor discharge tube and its preparation method, aiming to solve the problem that the existing TSS device is easy to cause signal distortion due to its high capacitance in the communication line

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