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High-sensitivity photoacoustic spectrometry detection device and method

A detection device and detection method technology, applied in measuring devices, material analysis through optical means, instruments, etc., can solve problems such as volume increase, environmental interference cannot be completely isolated, and cost increase

Pending Publication Date: 2020-01-31
NANJING NOVEL PHOTOELECTRIC SYST
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Problems solved by technology

However, the common defect of all the above-mentioned sensors is that they are sensitive to environmental noise and vibration, so the formed equipment must take very strict measures to isolate the influence of environmental noise and vibration
This not only brings the problems of increased volume and cost, but also the environmental interference cannot be completely isolated, and the system indicators are still affected in the actual industrial environment.

Method used

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Embodiment Construction

[0032] In order to better understand the principles and features of the present invention, the present invention will be further described below in conjunction with specific implementation examples and accompanying drawings.

[0033] figure 1 (a) shows the cantilever beam acoustic sensor 10 processed by MEMS technology in the prior art, wherein the cantilever beam 11 will vibrate under the action of the sound field, as shown in figure 1 (b) shown. For such tiny vibration signals, the most effective detection method is to use laser interferometry, such as figure 1 (c) A Michelson interferometer shown. The beam splitter 12 can split the incident laser beam 15 into two into a detection beam 17 and a reference beam 18. The detection beam 17 is reflected by the cantilever beam 11 and returns to the beam splitter 12 and is split again, half of which reaches the optical receiver. 14, interferes with half of the reference beam 18 reflected back by the mirror 13. This interferometr...

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Abstract

The invention relates to a photoacoustic signal detection system and method, and the system greatly reduces the interference brought by background noise and environmental vibration while realizing high-sensitivity photoacoustic signal detection by adopting a symmetrical torsion beam type acoustic sensor and combining a detection method of a differential photoacoustic cell.

Description

technical field [0001] The invention relates to a photoacoustic signal detection device and method. The device adopts a micro-processed acoustic sensor device with a torsion beam structure, which can eliminate the interference caused by environmental noise and vibration, and realize highly sensitive photoacoustic signal detection. It belongs to precision spectrum detection. technology field. Background technique [0002] With the rapid development of the economy, the problem of environmental pollution is becoming more and more serious, the air quality is seriously reduced, and the phenomenon of smog occurs frequently, which mainly comes from the emission of various polluting gases. Among them, air pollutants mainly include harmful gases such as carbon monoxide, sulfur dioxide and nitrogen oxides. These gases exist in the air. If they are not discovered and solved in time, they will have a great impact on people's health and daily life. Therefore, the monitoring and governan...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17
CPCG01N21/1702G01N2021/1704G01N2021/1706
Inventor 张辉曾智陈力
Owner NANJING NOVEL PHOTOELECTRIC SYST
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